SCOPUS 정보 검색 플랫폼

ECS Transactions

Volumn 25, Issue 27, 2009, Pages 215-220

Adhesive metal film formation on silicon by electroless deposition using catalytic anchors

(5) Yae, Shinji a Hirano, Tatsuya a Sakabe, Keisuke a Fukumuro, Naoki a Matsuda, Hitoshi a

a UNIVERSITY OF HYOGO (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; DEPOSITION; ETCHING; HYDROFLUORIC ACID; METAL NANOPARTICLES; METALLIC FILMS; METALS; NANOCOMPOSITE FILMS; NANOPORES; NANORODS; SUBSTRATES; THIN FILMS;

CONVENTIONAL METHODS; DEPOSITION OF METALS; ELECTROLESS DISPLACEMENT; ELECTROLESS METAL DEPOSITION; ELECTROLESS PROCESS; HYDROFLUORIC ACID ETCHING; NON-METALLIC SUBSTRATES; SILICON SUBSTRATES;

SILICON;

EID: 79952746978 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.3318521 Document Type: Conference Paper

Times cited : (5)

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