Observation of structure-sensitive decomposition of Cp(allyl)Pd on Pd nanodots formed by MOCVD

Chemical Vapor Deposition

Volumn 17, Issue 1-3, 2011, Pages 54-57

  Binder, Axel ^a   Seipenbusch, Martin ^a   Kasper, Gerhard ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

autocatalysis; Cp(allyl)Pd; decomposition kinetics; MOCVD precursor; structure sensitivity

Indexed keywords

AUTOCATALYSIS; CP(ALLYL)PD; DECOMPOSITION KINETICS; MOCVD PRECURSORS; STRUCTURE SENSITIVITY;

ATMOSPHERIC PRESSURE; ORGANOMETALLICS; PROTONS; SILICA; SUBSTRATES; TITANIUM DIOXIDE;

PALLADIUM;

EID: 79952746594     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.201006883     Document Type: Article

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