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Volumn 22, Issue 16, 2011, Pages

Deep UV nano-microstructuring of substrates for surface plasmon resonance imaging

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE OF INCIDENCE; DEEP UV; DEEP-UV LITHOGRAPHY; DIFFERENT SIZES; EXPERIMENTAL OBSERVATION; FEATURE SIZES; HIGH DOSE; LIFT-OFF PROCESS; MICRO STRUCTURING; PLASMONIC; RIGOROUS COUPLED WAVE ANALYSIS; SENSOR CHIPS; SPECTRAL REGION; SURFACE PLASMON RESONANCE IMAGING; WAFER SCALE FABRICATION;

EID: 79952684821     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/16/165301     Document Type: Article
Times cited : (31)

References (33)
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    • (1999) Sensors Actuators B , vol.54 , pp. 166-175
    • Pfeifer, P.A.1
  • 18
    • 0038528230 scopus 로고    scopus 로고
    • Felidj N, Aubard J, Lévi G, Krenn J R, Hohenau A, Schider G, Leitner A and Aussenegg F R 2003 Appl. Phys. Lett. 82 3095-7
    • (2003) Appl. Phys. Lett. , vol.82 , pp. 3095-3097
    • Felidj, N.A.1
  • 30
    • 71849096353 scopus 로고    scopus 로고
    • Duval A, Laisné A, Pompon D, Held S, Bellemain A, Moreau J and Canva M 2009 Opt. Lett. 34 3634-6
    • (2009) Opt. Lett. , vol.34 , pp. 3634-3636
    • Duval, A.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.