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Volumn 22, Issue 16, 2011, Pages
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Deep UV nano-microstructuring of substrates for surface plasmon resonance imaging
b
UNIV PARIS SUD
(France)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANGLE OF INCIDENCE;
DEEP UV;
DEEP-UV LITHOGRAPHY;
DIFFERENT SIZES;
EXPERIMENTAL OBSERVATION;
FEATURE SIZES;
HIGH DOSE;
LIFT-OFF PROCESS;
MICRO STRUCTURING;
PLASMONIC;
RIGOROUS COUPLED WAVE ANALYSIS;
SENSOR CHIPS;
SPECTRAL REGION;
SURFACE PLASMON RESONANCE IMAGING;
WAFER SCALE FABRICATION;
PLASMONS;
REFRACTIVE INDEX;
SURFACE PLASMON RESONANCE;
NANOMATERIAL;
ARTICLE;
CHEMISTRY;
CONFORMATION;
CRYSTALLIZATION;
MACROMOLECULE;
MATERIALS TESTING;
METHODOLOGY;
PARTICLE SIZE;
RADIATION DOSE;
RADIATION EXPOSURE;
SURFACE PLASMON RESONANCE;
SURFACE PROPERTY;
ULTRASTRUCTURE;
ULTRAVIOLET RADIATION;
CRYSTALLIZATION;
MACROMOLECULAR SUBSTANCES;
MATERIALS TESTING;
MOLECULAR CONFORMATION;
NANOSTRUCTURES;
PARTICLE SIZE;
RADIATION DOSAGE;
SURFACE PLASMON RESONANCE;
SURFACE PROPERTIES;
ULTRAVIOLET RAYS;
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EID: 79952684821
PISSN: 09574484
EISSN: 13616528
Source Type: Journal
DOI: 10.1088/0957-4484/22/16/165301 Document Type: Article |
Times cited : (31)
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References (33)
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