The effect of heat treatment process on structure and properties of ZnO nano layer produced by solgel method

Materials Science in Semiconductor Processing

Volumn 13, Issue 4, 2010, Pages 267-271

  Hossein Hejazi, Seyyed Mohammad ^a   Majidi, Fatemeh ^a   Pirhadi Tavandashti, Mohammad ^a   Ranjbar, Mohammad ^a  

^a SHAHID BAHONAR UNIVERSITY OF KERMAN   (Iran)

Author keywords

Heat treatment; Nano layers; Oxide materials; Solgel; X ray diffraction

Indexed keywords

DIETHANOLAMINE; HEAT TREATMENT PROCESS; HEAT TREATMENT TEMPERATURE; HIGH CRYSTALLINITY; HIGH TEMPERATURE HEAT TREATMENT; LOW TEMPERATURES; NANO LAYERS; ORGANIC COMPONENTS; OXIDE MATERIALS; SOL-GEL METHODS; STRUCTURE AND PROPERTIES; THERMAL ANALYSIS; THREE STAGES; ZINC ACETATE DIHYDRATE; ZNO;

BIOLOGICAL MATERIALS; DIFFRACTION; HARDENING; HEAT TREATMENT; METHANOL; ORGANIC SOLVENTS; THERMOANALYSIS; X RAY DIFFRACTION; ZINC OXIDE;

LOW TEMPERATURE OPERATIONS;

EID: 79952628633     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2010.12.004     Document Type: Article

References (18)

1. B.K.C.D.H. Chang, and Y.S.Y.S.J. Kang Optical characterization of ZnO thin films deposited by solgel method J Mater Sci: Mater Electron 17 2006 1011 1015
2. S. Sharma, A. Tran, V. Nalamasu, and P.S. Dutta Spin-coated ZnO thin films using ZnO nano-colloid J Electron Mater 35 2006 1237 1240 (Pubitemid 44090584)
3. H. Li, J. Wang, H. Liu, H. Zhang, and X. Li Zinc oxide films prepared by solgel method J Cryst Growth 275 2005 e943e046
4. M. Wang, E. Jung Kim, J.S. Chung, E.W. Shin, S.H. Hahn, K.E. Lee, and C. Park Influence of annealing temperature on the structural and optical properties of solgel prepared ZnO thin films Phys Status Solidi 203 2006 2418 2425 (Pubitemid 44342492)
5. Z.J. Zhifeng Liu, W. Li, and J. Qiu Preparation of ZnO porous thin films by solgel method using PEG template Mater Lett 59 2005 3620 3625 (Pubitemid 41491800)
6. B.M. Ataev, A.M. Bagamadova, and A.M. Djabrailov Highly conductive and transparent Ga-doped epitaxial ZnO films on sapphire by CVD Thin Solid Films 260 1995 19 20
7. B. Joseph, K.G. Gopchandran, and P.V. Thomas A study on the chemical spray deposition of zinc oxide thin films and their structural and electrical properties Mater Chem Phys 58 1999 71 77
8. N.K. Zayer, R. Greerf, and K. Rogers In situ monitoring of sputtered zinc oxide films for piezoelectric transducers Thin Solid Films 352 1999 179 184 (Pubitemid 129587831)
9. G. Machado, D.N. Guerra, D. Leinen, J.R. Ramos-Barrado, R.E. Marotti, and E.A. Dalchiele Indium doped zinc oxide thin films obtained by electrodeposition Thin Solid Films 490 2005 124 131 (Pubitemid 41218288)
10. Z. Liu, Z. Jin, W. Li, and J. Qiu Preparation of ZnO porous thin films by solgel method using PEG template Mater Lett 59 2005 3620 3625 (Pubitemid 41491800)
11. M. opurolu, S. OBrien, and G.M. Crean Solgel synthesis, comparative characterisation, and reliability analyses of undoped and Al-doped zinc oxide thin films Thin Solid Films 517 2009 6323 6326
12. K.R. Murali Properties of solgel dip-coated zinc oxide thin films J Phys Chem Solids 68 2007 2293 2296 (Pubitemid 350122575)
13. T. Ehara, T. Otsuki, J. Abe, T. Ueno, M. Ito, and T. Hirayama The effect of thermal treatment conditions employed in solgel method on the structure of ZnO thin films Phys Status Solidi A 206 2009 2139 2142
14. A.H. Jayatissa, K. Guo, T. Gupta, and A.C. Jayasuriya Spin coating of transparent zinc oxide films using novel precursor J Mater Sci: Mater Electron 20 2009 577 581
15. G. Mei- Zhen, F. Zhang, J. Liu, and H.N. Sun Effect of annealing conditions on properties of sol-gel derived Al-doped ZnO thin films Chin Phys Lett 26 2009 1 4
16. B.K. Sonawane, M.P. Bhole, and D.S. Patil Structural, optical and electrical properties of post annealed Mg doped ZnO films for optoelectronics applications Opt Quantum Electron 41 2009 17 26
17. Alam MJ, Cameron DC, Investigation of annealing effects on solgel deposited transparent conductive ZnO:Al thin films in different atmospheres, in: Proceedings of the Second International Conference on Electrical and Computer Engineering ICECE, Dhaka, Bangladesh, 2002.
18. K.S. Hwang, B.A. Kang, J.H. Jeong, Y.S. Jeon, and B.H. Kim Spin coating-pyrolysis derived highly c-axis-oriented ZnO layers pre-fired at various temperatures Curr Appl Phys 7 2007 421 425