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Macromolecular Rapid Communications

Volumn 32, Issue 6, 2011, Pages 518-522

Ring opening metathesis polymerization derived polymers as photoresists: Making use of thiol-ene chemistry

(5) Wolfberger, Archim a Rupp, Barbara c Kern, Wolfgang a Griesser, Thomas a Slugovc, Christian b

a UNIVERSITY OF LEOBEN (Austria)

b GRAZ UNIVERSITY OF TECHNOLOGY (Austria)

c POLYMER COMPETENCE CENTER LEOBEN GMBH (Austria)

Author keywords

crosslinking; photoresist; ring opening metathesis polymerization (ROMP); thiol ene chemistry

Indexed keywords

CROSSLINKED; DOUBLE BONDS; NORBORNENES; POLYMER BACKBONES; RING OPENING METATHESIS POLYMERIZATION; RING OPENING METATHESIS POLYMERIZATION (ROMP); THIOL-ENE CHEMISTRY; THIOL-ENES;

CHEMICAL BONDS; CROSSLINKING; PHOTORESISTS; POLYMER FILMS; POLYMERS; SURFACE TREATMENT;

RING OPENING POLYMERIZATION;

NORBORNANE DERIVATIVE; POLYMER; THIOL DERIVATIVE;

CHEMISTRY; POLYMERIZATION;

NORBORNANES; POLYMERIZATION; POLYMERS; SULFHYDRYL COMPOUNDS;

EID: 79952608647 PISSN: 10221336 EISSN: 15213927 Source Type: Journal
DOI: 10.1002/marc.201000698 Document Type: Article

Times cited : (36)

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