Low-reflectivity wire-grid polarizers multilayered by the glancing-angle-deposition technique

Journal of Nanomechanics and Micromechanics

Volumn 5, Issue 1, 2011, Pages

  Suzuki, Motofumi ^a   Takada, Akio ^b   Yamada, Takatoshi ^b   Hayasaka, Takashi ^b   Sasaki, Kouji ^b   Takahashi, Eiji ^b   Kumagai, Seiji ^b  

^a KYOTO UNIVERSITY   (Japan)

^b Sony Chemical and Information Device Corporation   (Japan)

Author keywords

Al; Antireflection; FeSi2; Ge; Glancing angle deposition; Wire grid polarizers

Indexed keywords

AL; ANTIREFLECTION; FESI2; GE; GLANCING ANGLE DEPOSITION; WIRE-GRID POLARIZERS; ABSORPTIVE MATERIALS; ANTI-REFLECTION; GLANCING ANGLE DEPOSITION TECHNIQUE; INORGANIC MATERIALS; LIQUID CRYSTAL PROJECTION DISPLAYS; POLARIZATION PROPERTIES; WIRE GRID POLARIZERS;

ALUMINUM; ANTIREFLECTION COATINGS; COATINGS; GERMANIUM; LIQUID CRYSTALS; OPTICAL INSTRUMENTS; OPTICAL PROJECTORS; POLARIZATION; REFLECTION; SILICON COMPOUNDS; WIRE; ALUMINUM COATINGS; DEPOSITION; DIELECTRIC MATERIALS; IRON COMPOUNDS; LOW-K DIELECTRIC; SILICA;

DIELECTRIC MATERIALS; WIRE;

EID: 79952596625     PISSN: 21535434     EISSN: 21535477     Source Type: Journal    
DOI: 10.1117/1.3543821     Document Type: Article

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