Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

Applied Surface Science

Volumn 257, Issue 12, 2011, Pages 5403-5407

  Sanza, F J ^a   Laguna, M F ^a   Casquel, R ^a   Holgado, M ^a   Barrios, C A ^a   Ortega, F J ^b   Lopez Romero D ^a   Garcia Ballesteros J J ^a   Banuls M J ^b   Maquieira, A ^b   Puchades, R ^b  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b UNIVERSITAT POLITÈCNICA DE VALÈNCIA   (Spain)

Author keywords

Excimer laser; Label free biosensing; Microfabrication; Photolithography; SU 8

Indexed keywords

COSTS; EXCIMER LASERS; FLUORINE COMPOUNDS; MICROFABRICATION; MICROSTRUCTURE; PHOTOLITHOGRAPHY; PHOTOMASKS; POLYIMIDES; X RAY LITHOGRAPHY;

248 NM EXCIMER LASER; BIOSENSING CAPABILITY; CHARACTERIZATION TECHNIQUES; INSULIN-LIKE GROWTH FACTOR; LABEL-FREE BIOSENSING; LOW COST FABRICATION; SILICON SUBSTRATES; SU-8;

COST EFFECTIVENESS;

EID: 79952315881     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.10.010     Document Type: Conference Paper

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