Electrodepositing amorphous Ni-W alloys for MEMS

Microelectronic Engineering

Volumn 87, Issue 10, 2010, Pages 1901-1906

  Wang, Hong ^a   Liu, Rui ^a   Cheng, Feng Ji ^a   Cao, Ying ^a   Ding, Gui Fu ^a   Zhao, Xiao Lin ^a  

^a Shanghai Jiao Tong University   (China)

Author keywords

Amorphous; Corrosion resistance; MEMS; Ni W; Wearing resistance

Indexed keywords

AMORPHOUS ALLOYS; AMORPHOUS FILMS; AMORPHOUS MATERIALS; CORROSION; CORROSION RESISTANCE; CRYSTAL STRUCTURE; ELECTRODEPOSITION; ELECTRODES; HEAT TREATMENT; MEMS; METALLIC FILMS; NICKEL; TUNGSTEN ALLOYS;

AFTER-HEAT TREATMENT; EXCELLENT CORROSION RESISTANCES; MICRO SPINNERET; NI FILMS; NI-W ALLOY; UV-LIGA TECHNOLOGY; WEARING RESISTANCES;

TUNGSTEN;

EID: 79952259718     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.018     Document Type: Article

References (9)

1. M. Bratoeva, N. Atanassov, Nickel-tungsten alloy electrodeposition from a sulfamate electrolyte, Metal Finish 96 (6) (1998) 98-99.
2. C.-A. Schuh, T.-G. Nieh, H. Iwasaki, The effect of solid solution W additions on the mechanical properties of nanocrystalline Ni, Acta Materialia 51 (2003) 431-443.
3. K.-R. Sriraman, S.-G. Raman, S.-K. Seshadri, Synthesis and evaluation of hardness and sliding wear resistance of electrodeposited nanocrystalline Ni-W alloys, Mater Sci Eng 418 (2006) 303-311.
4. A.-S. Haseeb, U. Albers, K. Bade, Friction and wear characteristics of electrodeposited nanocryatalline nickel-tungsten alloy films, Wear 246 (2) (2007) 106-112.
5. T. Yamasaki, P. Schloßmacher, K. Ehrlich, Y. Ogino, Formation of amorphous electrodeposited Ni-W alloys and their nanocrystallization, Nanostruct Mater 10 (1998) 375-388.
6. R. Liu, H. Wang, J.-Y. YAO, X.-P. Li, G.-F. Ding, Preparing Ni-W alloy films with low internal stress and high hardness by heat treating, Surf Rev Lett 14 (6) (2007) 1107-1112.
7. L. Zhu, O. Younes, N. Ashkenasy, D.-Y. Shacham, E. Gileadi, STM/AFM studies of the evolution of morphology of electroplated Ni/W alloys, App Surf Sci 200 (1) (2002) 1-14. (Pubitemid 35220123)
8. S.H. Chen, Glassy metals, Rep Prog Phys 43 (1980) 353-432.
9. L.L. Wang, C.S. Guan, C.Z. Sun, Effect of heat treatment on bonding strength and microhardness of Ni-P coating, Plating and Finishing 30 (2) (2008) 4-6 (in Chinese).