Phenomenological theory and experimental characterizations of passive wireless EM pressure micro-sensor prototype

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 643-646

  Jatlaoui, Mohamed Mehdi ^a,b   Chebila, Franck ^a,b   Idda, Tonio ^a,b   Pons, Patrick ^a,b   Aubert, Hervé ^a,b  

^a LAAS CNRS   (France)

^b INSA   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYSIS METHOD; ELECTRICAL PROPERTY; ELECTROMAGNETIC TRANSDUCTION; EXPERIMENTAL CHARACTERIZATION; EXPERIMENTAL STUDIES; EXTERNAL PRESSURES; HIGH RESISTIVITY SILICON; KA BAND; ON-WAFER; PHENOMENOLOGICAL THEORY; PHYSICAL PHENOMENA; PRESSURE AND TEMPERATURE; PRESSURE CELL; PRESSURE MEASUREMENT DEVICES; PRESSURE MONITORING; PROOF OF CONCEPT; QUARTER-WAVELENGTH RESONATORS; RESONANT FREQUENCIES; SENSING ELEMENTS; SENSOR DESIGNS; THEORETICAL RESULT;

BACTERIOPHAGES; ELECTRIC PROPERTIES; ELECTROMAGNETISM; MICROSENSORS; NATURAL FREQUENCIES; PRESSURE SENSORS; RESONATORS; SILICON WAFERS; TEMPERATURE MEASUREMENT;

MICROWAVE SENSORS;

EID: 79951887882     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690101     Document Type: Conference Paper

References (12)

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12. th European Microwave conference (EuMC2010), Paris (France), September 2010.