Pressure micro-sensor based on radio-frequency transducer

IEEE MTT-S International Microwave Symposium Digest

Volumn 2008-January, Issue , 2008, Pages 1203-1206

  Jatlaoui, Mohamed Mehdi ^a,b   Pons, Patrick ^a   Aubert, Hervé ^a,b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Coplanar waveguide; Planar microwave resonator; Pressure micro sensor; Radio frequency transducer; Wafer bonding

Indexed keywords

ACOUSTIC RESONATORS; MILLIMETER WAVE DEVICES; MILLIMETER WAVES; NATURAL FREQUENCIES; PRESSURE SENSORS; RADIO WAVES; TRANSDUCERS;

APPLIED PRESSURE; COPLANAR TECHNOLOGY; MICROSTRIP TECHNOLOGY; MILLIMETER FREQUENCY RANGE; MILLIMETER WAVE RESONATORS; PLANAR RESONATORS; RADIO FREQUENCIES; SILICON MEMBRANES;

MICROSENSORS;

EID: 79951886095     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Kensall D.Wise, “Integrated sensors, MEMS, and Microsystems: Reflections on a fantastic voyage”, Sensors and Actuators A 136 (2007) 39-50.
2. M.M.Jatlaoui, P.Pons, H.Aubert “Radio Frequency Pressure Transducer”, 37th European Microwave Conference, pp.736-739, October 2007.
3. G.L.Matthei, L. Young, and E. M. T. Jones, Microwave Filters,Impedance Matching Networks, and Coupling Structures. Norwell,MA: Artech House, 1980.
4. Ingo Wolff, Coplanar Microwave Integrated Circuits, Wiley, 2006.