Fabrication, Structural Characterization and Testing of a Nanostructured Tin Oxide Gas Sensor

IEEE Sensors Journal

Volumn 9, Issue 5, 2009, Pages 563-568

  Partridge, James G ^a   Field, Matthew R ^a   Sadek, Abu Z ^a   Kalantar Zadeh, Kourosh ^a   Du Plessis, Johan ^a   Taylor, Matthew B ^a   Atanacio, Armand ^b   Prince, Kathryn E ^b   McCulloch, Dougal G ^a  

^a RMIT UNIVERSITY   (Australia)

^b AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

Gas detectors; Microscopy; Nanotechnology; Thin film devices

Indexed keywords

GAS DETECTORS; GAS SENSING ELECTRODES; GASES; ION BEAMS; MICROSCOPIC EXAMINATION; NANOTECHNOLOGY; NITROGEN OXIDES; OXIDE MINERALS; SECONDARY ION MASS SPECTROMETRY; SILICON COMPOUNDS; TEMPERATURE; THERMOOXIDATION; THIN FILM DEVICES; THIN FILMS; TIN OXIDES; TITANIUM DIOXIDE; TRANSMISSION ELECTRON MICROSCOPY;

CONDUCTOMETRIC GAS SENSORS; IDENTICAL PROCESS; NANO-STRUCTURED; NANOSTRUCTURED TIN OXIDES; OPERATING TEMPERATURE; STRUCTURAL CHARACTERIZATION; THERMAL OXIDATION PROCESS; THERMALLY OXIDIZED;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 79951548038     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2016613     Document Type: Article

References (17)

1. K. Ihokura and J. Watson, The Stannic Oxide Gas Sensor: Principles and Applications. Boca Raton, FL: CRC Press, 1994.
2. 2 gas sensors: A status report," J. Anal Chem., vol. 365, no. 4, pp. 287-304, Oct. 1999.
3. N. Barsan and U. Weimar, "Conduction model of metal oxide gas sensors," J. Electroceramics, vol. 7, no. 3, pp. 143-167, Dec. 2001.
4. 2 nanoparticles in ambient gas atmosphere," Sens. Actuators B, vol. 109, no. 1, pp. 13-18, Aug. 2005.
5. M. A. El Khakani, R. Dolbec, A. M. Serventi, M. C. Horrillo, M. Trudeau, R. G. Saint-Jacques, D. G. Rickerby, and I. Sayago, "Pulsed laser deposition of nanostructured tin oxide films for gas sensing applications," Sens. Actuators B, vol. 77, no. 1, pp. 383-388, Jun. 2001.
6. 2 thin films prepared under different oxygen partial pressure values," Vacuum, vol. 47, no. 10, pp. 1175-1177, Oct. 1996.
7. 2 thin film (RGTO technique)," Semicond. Sci. Technol, vol. 5, no. 12, pp. 1231-1233, Dec. 1990.
8. X. Q. Pan and L. Fu, "Oxidation and phase transitions of epitaxial tin oxide thin films on (1012) sapphire," J. Appl. Phys., vol. 89, no. 11, pp. 6048-6055, Jun. 2001.
9. A. Kolmakov, Y. Zhang, and M. Moskovits, "Topotactic thermal oxidation of Sn nanowires: Intermediate suboxides and core-shell metastable structures," Nano Lett., vol. 3, no. 8, pp. 1125-1129, Jul. 2003.
10. 2 films prepared from evaporated Sn and their application as gas sensors," Nanotechnology, vol. 19, no. 12, p. 125504 (5pp), Mar. 2008.
11. SPI Supplies, Prod. No. 4096SN-BA.
12. 2 99.9%-325 Mesh, Prod. No. 244651-100G.
13. J. H. Scofield, "Hartree-Slater subshell photoionization cross-sections at 1254 and 1487 eV," J. Electron Spectrosc. Relat. Phenom., vol. 8, pp. 129-137, 1976.
14. 2 concentrations in air," Sens. Actuators B, Chem., vol. 43, no. 1, pp. 154-160, Sep. 1997.
15. S. Ahlers, G. Müller, and T. Doll, "A rate equation approach to the gas sensitivity of thin film metal oxide materials," Sens. Actuators B, Chem., vol. 107, no. 2, pp. 587-599, Jun. 2005.
16. x sensor," IEEE Trans. on Electron Devices, vol. 26, no. 12, pp. 1875-1880, Dec. 1979.
17. P. T. Moseley and A. J. Crocker, Sensor Materials. Bristol, U.K.: Institute of Physics Publishing, 1996, pp. 71-74.