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Journal of Micromechanics and Microengineering

Volumn 21, Issue 2, 2011, Pages

Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers

(3) Bogunovic, L a Anselmetti, D a Regtmeier, J a

a BIELEFELD UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS SOLUTIONS; FUNCTIONALIZATIONS; HIGH-THROUGHPUT METHOD; MICRO-PARTICLES; PROCESSING TIME; RELEASE LAYER; SACRIFICIAL LAYER; STANDARD DEVIATION; STATISTICAL ANALYSIS; SU-8 STRUCTURE;

MOLECULAR BIOLOGY;

MOLECULAR RECOGNITION;

EID: 79551703476 PISSN: 09601317 EISSN: 13616439 Source Type: Journal
DOI: 10.1088/0960-1317/21/2/027003 Document Type: Article

Times cited : (12)

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