Robust si-based membranes for fluid control in microbatteries using superlyophobic nanostructures

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 73-82

  Lifton, Victor A ^a   Simon, Steve ^a  

^a MPhase Technologies Inc   (United States)

Author keywords

Battery; electrowetting; membrane; microelectromechanical systems (MEMS) processing; porous; superhydrophobic

Indexed keywords

BATTERY; ELECTROWETTING; MICROELECTROMECHANICAL SYSTEMS; POROUS; SUPERHYDROPHOBIC;

ANGLE MEASUREMENT; COATINGS; COMPOSITE MICROMECHANICS; CONTACT ANGLE; FLUORINE CONTAINING POLYMERS; FUEL CELLS; HYDROPHOBICITY; MECHATRONICS; MEMBRANES; MEMS; MICROELECTROMECHANICAL DEVICES; WETTING;

MICROFILTRATION;

EID: 79551585385     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2090504     Document Type: Article

References (32)

1. L. B. Boinovich and A. M. Emelyanenko, "Hydrophobic materials and coatings: Principles of design, properties and applications," Russ. Chem. Rev., vol. 77, no. 7, pp. 583-600, 2008.
2. L. Gao and T. J. McCarthy, "Wetting 101 ?†," Langmuir, vol. 25, no. 24, pp. 14 105-14 115, Dec. 2009.
3. A. Tuteja, W. Choi, M. Ma, J. M. Mabry, S. A. Mazzella, G. C. Rutledge, G. H. McKinley, and R. E. Cohen, "Designing superoleophobic surfaces," Science, vol. 318, no. 5856, pp. 1618-1622, Dec. 2007.
4. D. Quéré, "Wetting and roughness," Annu. Rev. Mater. Res., vol. 38, no. 1, pp. 71-99, 2008.
5. P. Roach, N. J. Shirtcliffe, and M. I. Newton, "Progess in superhydrophobic surface development," Soft Matter, vol. 4, no. 2, pp. 224-240, 2008.
6. J. Heikenfeld and M. Dhindsa, "Electrowetting on superhydrophobic surfaces: Present status and prospects," J. Adhesion Sci. Technol., vol. 22, no. 3, pp. 319-334, 2008.
7. V. A. Lifton and S. Simon, "Wetting the surface: From self-cleaning leaves to energy storage devices," in Bionanotechnology: Global Prospects, D. Reisner, Ed. Boca Raton, FL: CRC Press, 2009.
8. T. N. Krupenkin, J. A. Taylor, T.M. Schneider, and S. Yang, "From rolling ball to complete wetting: The dynamic tuning of liquids on nanostructured surfaces," Langmuir, vol. 20, no. 10, pp. 3824-3827, May 2004.
9. H. Lee and J. Owens, "Design of superhydrophobic ultraoleophobic NyCo," J. Mater. Sci., vol. 45, no. 12, pp. 3247-3253, Jun. 2010.
10. D. Han and A. J. Steckl, "Superhydrophobic and oleophobic fibers by coaxial electrospinning," Langmuir, vol. 25, no. 16, pp. 9454-9462, Aug. 2009.
11. A. Ahuja, J. A. Taylor, V. Lifton, A. A. Sidorenko, T. R. Salamon, E. J. Lobaton, P. Kolodner, and T. N. Krupenkin, "Nanonails: A simple geometrical approach to electrically tunable superlyophobic surfaces," Langmuir, vol. 24, no. 1, pp. 9-14, Jan. 2008.
12. S. S. Chhatre, W. Choi, A. Tuteja, K.-C. Park, J. M. Mabry, G. H. McKinley, and R. E. Cohen, "Scale dependence of omniphobic mesh surfaces," Langmuir, vol. 26, no. 6, pp. 4027-4035, Mar. 2010.
13. V. A. Lifton and S. Simon, "Preparation and electrowetting transitions on superhydrophobic/hydrophilic bi-layer structures," J. Porous Mater., 2010. DOI: 10.1007/s10934-010-9406-0.
14. B. Balu, V. Breedveld, and D. W. Hess, "Fabrication of 'Roll-off' and 'Sticky' superhydrophobic cellulose surfaces via plasma processing," Langmuir, vol. 24, no. 9, pp. 4785-4790, May 2008.
15. B. Balu, J. S. Kim, V. Breedveld, and D. W. Hess, "Tunability of the adhesion of water drops on a superhydrophobic paper surface via selective plasma etching," J. Adhesion Sci. Technol., vol. 23, no. 2, pp. 361-380, 2009.
16. A. Tuteja, W. Choi, J. M. Mabry, G. H. McKinley, and R. E. Cohen, "Robust omniphobic surfaces," Proc. Nat. Acad. Sci., vol. 105, no. 47, pp. 18 200-18 205, Nov. 2008.
17. V. A. Lifton, J. A. Taylor, B. Vyas, P. Kolodner, R. Cirelli, N. Basavanhally, A. Papazian, R. Frahm, S. Simon, and T. Krupenkin, "Superhydrophobic membranes with electrically controllable permeability and their application to 'smart' microbatteries," Appl. Phys. Lett., vol. 93, no. 4, p. 043 112, Jul. 2008.
18. V. A. Lifton, S. Simon, and R. E. Frahm, "Reserve battery architecture based on superhydrophobic nanostructured surfaces," Bell Labs Tech. J., vol. 10, no. 3, pp. 81-85, 2005.
19. V. A. Lifton, S. Simon, and F.M. Allen, "A chemistry-independent microbattery with enhanced functionality," in Proc. NSTI, 2008, pp. 467-470.
20. V. A. Lifton and S. Simon, "Micro scale addressable superhydrophobic reserved batteries using nanostructured materials," in Proc. 42nd Power Sources Conf., Jun. 2006, pp. 1-4.
21. F. Mugele and J. Baret, "Electrowetting: From basics to applications," J. Phys., Condens. Matter, vol. 17, no. 28, pp. R705-R774, Jul. 2005.
22. H. Liu, S. Dharmatilleke, D. K. Maurya, and A. A. O. Tay, "Dielectric materials for electrowetting-on-dielectric actuation," Microsyst. Technol., vol. 16, no. 3, pp. 449-460, 2009.
23. E. Seyrat and R. A. Hayes, "Amorphous fluoropolymers as insulators for reversible low-voltage electrowetting," J. Appl. Phys., vol. 90, no. 3, pp. 1383-1386, Aug. 2001. (Pubitemid 33664564)
24. S. M. M. Ramos, A. Benyagoub, B. Canut, and C. Jamois, "Superoleophobic behavior induced by nanofeatures on oleophilic surfaces," Langmuir, vol. 26, no. 7, pp. 5141-5146, Apr. 2010.
25. E. Lobaton and T. Salamon, "Computation of constant mean curvature surfaces: Application to the gas-liquid interface of a pressurized fluid on a superhydrophobic surface," J. Colloid Interface Sci., vol. 314, no. 1, pp. 184-198, Oct. 2007.
26. A. Tokarev, K. Friess, J. Machkova, M. Scaronipek, and Y. Yampolskii, "Sorption and diffusion of organic vapors in amorphous Teflon AF2400," J. Polym. Sci. B, Polym. Phys., vol. 44, no. 5, pp. 832-844, Mar. 2006.
27. A. Polyakov, G. Bondarenko, A. Tokarev, and Y. Yampolskii, "Intermolecular interactions in target organophilic pervaporation through the films of amorphous Teflon AF2400," J. Membrane Sci., vol. 277, no. 1, pp. 108- 119, Jun. 2006.
28. I. Pinnau and L. G. Toy, "Gas and vapor transport properties of amorphous perfluorinated copolymer membranes based on 2,2-bistrifluoromethyl- 4,5-difluoro-1,3-dioxole/tetrafluoroethylene," J. Membrane Sci., vol. 109, no. 1, pp. 125-133, Jan. 1996.
29. N. Verplanck, Y. Coffinier, V. Thomy, and R. Boukherroub, "Wettability switching techniques on superhydrophobic surfaces," Nanoscale Res. Lett., vol. 2, no. 12, pp. 577-596, Dec. 2007.
30. M. J. Vogel and P. H. Steen, "Capillarity-based switchable adhesion," Proc. Nat. Acad. Sci., vol. 107, no. 8, pp. 3377-3381, Feb. 2010.
31. S. S. Chhatre, A. Tuteja, W. Choi, A. Revaux, D. Smith, J. M. Mabry, G. H. McKinley, and R. E. Cohen, "Thermal annealing treatment to achieve switchable and reversible oleophobicity on fabrics," Langmuir, vol. 25, no. 23, pp. 13 625-13 632, Dec. 2009.
32. T. Metz, J. Viertel, C. Müller, S. Kerzenmacher, N. Paust, R. Zengerle, and P. Koltay, "Passive water management for μfuel-cells using capillary microstructures," J. Micromech. Microeng., vol. 18, no. 10, p. 104 007, Oct. 2008.