Fabrication of thermal insulation structure for uncooled pyroelectric thin film IR detector

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 25, Issue 7, 2004, Pages 847-851

  Li, Liang ^a   Yao, Xi ^a   Zhang, Liangying ^a  

^a TONGJI UNIVERSITY   (China)

Author keywords

Buffer silica film; Porous silica film; Pyroelectric thin film IR detector; Sol gel; Thermal isolation

Indexed keywords

ATOMIC FORCE MICROSCOPY; HEAT FLUX; INFRARED DETECTORS; INFRARED IMAGING; POROUS MATERIALS; PYROELECTRICITY; REFRACTIVE INDEX; SILICA; SOL-GELS; SURFACE TOPOGRAPHY; THERMAL INSULATION;

BUFFER SILICA FILM; THERMAL INSULATION STRUCTURE; UNCOOLED PYROELECTRIC THIN FILMS;

SEMICONDUCTING FILMS;

EID: 7944226676     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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