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Materials Science Forum

Volumn 615 617, Issue , 2009, Pages 625-628

Single crystal and polycrystalline 3C-SiC for MEMS applications

(4) Henry, Anne a Janzén, Erik a Mastropaolo, Enrico b Cheung, Rebecca b

a LINKÖPING UNIVERSITY (Sweden)

b UNIVERSITY OF EDINBURGH (United Kingdom)

Author keywords

3C SiC; MEMS; Young's modulus

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; ELASTIC MODULI; FILMS; MEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; POLYCRYSTALLINE MATERIALS; SILICON WAFERS; SINGLE CRYSTALS;

3C-SIC; CANTILEVER DEVICES; CANTILEVER RESONATORS; HOT WALL CHEMICAL VAPOR DEPOSITION; OPTIMAL MATERIALS; POLYCRYSTALLINE 3C-SIC; POLYCRYSTALLINE SIC; RESONANCE FREQUENCIES;

SILICON CARBIDE;

EID: 79251586550 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/MSF.615-617.625 Document Type: Conference Paper

Times cited : (5)

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