Depth profiling analysis of barrier-type anodic aluminium oxide films formed on substrates of controlled roughness

Surface and Interface Analysis

Volumn 43, Issue 1-2, 2011, Pages 183-186

  Trigoulet, N ^a   Tuccitto, N ^b   Delfanti, I ^b   Licciardello, A ^b   Molchan, I S ^a   Skeldon, P ^a   Thompson, G E ^a   Tempez, A ^c   Chapon, P ^c  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b UNIVERSITY OF CATANIA   (Italy)

^c HORIBA LTD   (Japan)

Author keywords

anodic oxide; depth resolution; GD OES; roughness; TOF SIMS

Indexed keywords

ANODIC OXIDES; DEPTH RESOLUTION; GD-OES; ROUGHNESS; TOF SIMS;

ALUMINUM; DEPTH PROFILING; EMISSION SPECTROSCOPY; GLOW DISCHARGES; OPTICAL EMISSION SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY;

OXIDE FILMS;

EID: 78951487305     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3410     Document Type: Conference Paper

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