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Proceedings of SPIE - The International Society for Optical Engineering
Volumn 2782, Issue , 2004, Pages 38-46
Double spectral modulation for surface analysis
Author keywords

[No Author keywords available]
Indexed keywords

3-D IMAGE; INTERFEROGRAMS; LATERAL SCANNING; NANOMETRIC RESOLUTION; OPTICAL PATH DIFFERENCE; PHASE SHIFTING INTERFEROMETRY; SPECTRAL MODULATION; SURFACE POINTS; SURFACE SCANNING; WHITE LIGHT; WHITE-LIGHT INTERFEROMETRY;
EID: 78951468959     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.250765     Document Type: Conference Paper
Times cited : (1)
References (8)
  • 1
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    • San Diego, California, 13-14 July
    • P. Sandoz, H. Perrin, G. Tribillon, J. Calatroni, A. Guerrero, C. Sainz, R. Escalona " Optical implementation of frequency domain analysis " SPIE, Vol. 2545,pp 221-228. San Diego, California, 13-14 July 1995
    • (1995) SPIE , vol.2545 , pp. 221-228
    • Sandoz, P.1    Perrin, H.2    Tribillon, G.3    Calatroni, J.4    Guerrero, A.5    Sainz, C.6    Escalona, R.7
  • 2
    • 0030126002 scopus 로고    scopus 로고
    • High resolution profilometryby using phase calculation algorithms for spectroscopic analysis of white light interferograms
    • No 3.3
    • P. Sandoz, G. Tribillon, H. Perrin. " High resolution profilometryby using phase calculation algorithms for spectroscopic analysis of white light interferograms" J. Mod. Optics, 1996, Vol.3,No 3.3-
    • (1996) J. Mod. Optics , vol.3
    • Sandoz, P.1    Tribillon, G.2    Perrin, H.3
  • 3
    • 78951493482 scopus 로고    scopus 로고
    • Spectrally Resolved White-Light Interferometry as a profilometry tool
    • to be published
    • J. Calatroni, A.L. Guerrero, C. Sainz, R. Escalona. " Spectrally Resolved White-Light Interferometry as a profilometry tool" Opt. Laser Tech. to be published
    • Opt. Laser Tech.
    • Calatroni, J.1    Guerrero, A.L.2    Sainz, C.3    Escalona, R.4
  • 4
    • 0025529932 scopus 로고
    • Multichannel chromatic interferometry: Metrology applications
    • San Diego, California, 8-13 July
    • G. Tribillon, J. Calatroni, P. Sandoz." Multichannel chromatic interferometry: metrology applications" SPIE Vol. 1332,p.632-642. San Diego, California, 8-13 July 1990.
    • (1990) SPIE , vol.1332 , pp. 632-642
    • Tribillon, G.1    Calatroni, J.2    Sandoz, P.3
  • 5
    • 0010538283 scopus 로고
    • Surface profiling by means of double spectral modulation
    • 1 January
    • J. Calatroni, P. sandoz, G. Tribillon. " Surface profiling by means of double spectral modulation " Applied Optics, vol.32,No 1,1 January 1993,pp.30-37
    • (1993) Applied Optics , vol.32 , Issue.1 , pp. 30-37
    • Calatroni, J.1    Sandoz, P.2    Tribillon, G.3
  • 6
    • 0028466177 scopus 로고
    • A solution to the problem of stationary phase in double spectral modulation profilometry
    • A.L. Guerrero, C. Sainz, J. Calatroni " A solution to the problem of stationary phase in double spectral modulation profilometry" Opt. Comm. 109 (1994) 375-379.
    • (1994) Opt. Comm. , vol.109 , pp. 375-379
    • Guerrero, A.L.1    Sainz, C.2    Calatroni, J.3
  • 7
    • 0002562479 scopus 로고
    • Spatial carrier fringe pattern analysis an its applications to precision interferometry: An overview
    • M. Takeda. " Spatial carrier fringe pattern analysis an its applications to precision interferometry: An overview " Industrial Metrology. Elsevier. 1 (1990) 79-99.
    • (1990) Industrial Metrology. Elsevier , vol.1 , pp. 79-99
    • Takeda, M.1
  • 8
    • 84975589999 scopus 로고
    • Digital Holographic interference phase measurement using the Fourier-transfom method
    • June
    • T. Kreis " Digital Holographic interference phase measurement using the Fourier-transfom method" J.Opt.Soc.Am.vol.3,No 6, June 1986, pp.847-85
    • (1986) J.Opt.Soc.Am. , vol.3 , Issue.6 , pp. 847-885
    • Kreis, T.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.