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Volumn 85, Issue 7, 2011, Pages 739-743
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Applications of non evaporable getter pump in vacuum metrology
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Author keywords
Extension of calibration lower limit; Non evaporable getter pump; Vacuum metrology
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Indexed keywords
CONDUCTANCE METHOD;
EXTREMELY HIGH VACUUM;
IN-VACUUM;
LOWER LIMITS;
NON-EVAPORABLE GETTERS;
VACUUM LEAK;
VACUUM METROLOGY;
VACUUM STANDARDS;
CALIBRATION;
GETTERS;
MEASUREMENTS;
PUMPS;
RESEARCH LABORATORIES;
STANDARDS;
VACUUM;
VACUUM TECHNOLOGY;
VACUUM APPLICATIONS;
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EID: 78751569857
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2010.11.008 Document Type: Article |
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Times cited : (25)
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References (8)
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