The gas flux distribution in the XHV chamber of the vacuum primary standard developed by PTB

Vacuum

Volumn 73, Issue 2, 2004, Pages 249-255

  Szwemin, P ^a   Jousten, Karl ^b   Szymanski K ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Continuous expansion; DSMC; Free molecular flow; High vacuum standard; Monte Carlo

Indexed keywords

COMPUTER SIMULATION; DEGASSING; ERROR ANALYSIS; FLOW OF FLUIDS; GAGES; MOLECULAR DYNAMICS; MONTE CARLO METHODS; ORIFICES;

CONTINUOUS EXPANSION; DIRECT SIMULATION MONTE CARLO (DSMC) METHOD; FREE MOLECULAR FLOW; HIGH VACUUM STANDARDS;

VACUUM TECHNOLOGY;

EID: 1342285719     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.010     Document Type: Conference Paper

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