Analysis on the process of ZAO films by DC magnetron reactive sputtering

Science China Technological Sciences

Volumn 54, Issue 1, 2011, Pages 28-32

  Lu, Feng ^a   Xu, Chenghai ^b   Wen, Lishi ^c  

^a Shenyang Jianzhu Uinversity   (China)

^b NORTHEASTERN UNIVERSITY   (China)

^c INSTITUTE OF METAL RESEARCH   (China)

Author keywords

resistivity; transmissivity; ZAO film

Indexed keywords

ELECTRIC CONDUCTIVITY; II-VI SEMICONDUCTORS; OXIDE MINERALS; REACTIVE SPUTTERING; THIN FILMS; ZINC OXIDE;

APPLICATION REQUIREMENTS; DC MAGNETRON REACTIVE SPUTTERING; DC REACTIVE MAGNETRON SPUTTERING; OPTICAL AND ELECTRICAL PROPERTIES; ORGANIZATIONAL STRUCTURES; PREPARATION PARAMETERS; PROCESS PARAMETERS; TRANSMISSIVITY;

FILM PREPARATION;

EID: 78651492030     PISSN: 16747321     EISSN: 18691900     Source Type: Journal    
DOI: 10.1007/s11431-010-4178-y     Document Type: Article

References (7)

1. J. Ma F. Ji D. H. Zhang, et al. 1999 Optical and electronic properties of transparent conducting ZnO and ZnO:Al films prepared by evaporating method Thin Solid Films 357 2 98 101 10.1016/S0040-6090(99)00357-0
2. J. Mass P. Bhattacharya R. S. Katiyar 2003 Effect of high substrate temperature on Al-doped ZnO thin films grown by pulsed laser deposition Mater Sci Eng B 103 1 9 15 10.1016/S0921-5107(03)00127-2
3. S. H. Jeong J. H. Boo 2004 Influence of target-to-substrate distance on the properties of AZO films grown by RF magnetron sputtering Thin Solid Films 447-448 105 110 10.1016/j.tsf.2003.09.031
4. C. Guillen J. Herrero 2006 High conductivity and transparent ZnO: Al films prepared at low temperature by DC and MF magnetron sputtering Thin Solid Films 515 640 6431 10.1016/j.tsf.2005.12.227
5. R. Groenen P. M. Sommeing J. L. Linden, et al. 2001 Surface textured ZnO films for thin film solar cell application by expanding thermal plasma CVD Thin Solid Films 392 226 230 10.1016/S0040-6090(01)01032-X
6. M. Rusop K. Uma T. Sog, et al. 2006 Post-growth annealing of zinc oxide thin films pulsed laser deposited under enhanced oxygen pressure on quartz and silicon substrates Mater Sci Eng B 127 150 153 10.1016/j.mseb.2005.10.012
7. G. Srinivasan R. T. R. Kumar J. Kumar 2007 Influence of Al dopant on microstructure and optical properties of ZnO thin films prepared by sol-gel spin coating method Opt Mater 30 314 317 10.1016/j.optmat.2006.11.075