Design and fabrication of micro pump for functional fluid power actuation system

Next-Generation Actuators Leading Breakthroughs

Volumn , Issue , 2010, Pages 153-164

  Tanaka, Yutaka ^a   Yokota, Shinichi ^b  

^a HOSEI UNIVERSITY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 78651440255     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-1-84882-991-6_14     Document Type: Chapter

References (9)

1. Fan LS, Tai YC, Muller RS (1989) IC-Processed electrostatic micro motor. Sensors and Actuators 20:41-48
2. Park JH, Yoshida K, Yokota S (1999) Resonantly Driven Piezoelectric Micro Pump Fabrication of a Micro Pump Having High Power Density. Mechatronics 9 No.7: 687-702
3. Yoshida K, Yokota S (1993) Study on High-power Micro Actuator Using Fluid Power. Proc of 6th FLOMEKO:120-130
4. Ohtsubo Y, Edamura K (1997) Dieelectric Fluid Motors. Applied Physics Letters 71 (3): 318- 320
5. Yokota S, Kondoh Y, Sadamoto A, Ohtsubo Y, Edamura K (2001) A Micro Motor Using Electro-conjugate Fluids (Proposition of Stator Electrode-Type (SE-type) Micro ECF motors). JSME International Journal 44 (C-3):756-762
6. Yokota S, Kawamura K, Takemura K, Edamura K (2005) High Integration Micro-motor Using Electro-Conjugate Fluids (ECF). Journal of Robotics and Mechatronics 17 (2):142-148
7. Woo-Suk Seo, Yoshida K, Yokota S, Edamura K (2007) A High Performance Planar Pump Using Electro-conjugate Fluid with Improved Electrode Patterns. Sensors and Actuators A: Physical 134:606-614
8. Tanaka Y, Ziegelheim J, Yokota S (2006) Design and Fabrication of Actuation System Using Functional Fluid. Proc. 19th International Conference on Hydraulics and Pneumatics: 218- 228
9. Yamazaki M, Suzuki T, Mori N, Kunieda M (2004) EDM of Micro-rods by Self-drilled Holes. Journal of Materials and Processing Technology 149:134-138