Argon ion velocity distributions in a helicon discharge measured by laser induced fluorescence

Journal of Physics: Conference Series

Volumn 227, Issue , 2010, Pages

  Luggenholscher D ^a   Celik, Y ^a   Pu, Y K ^b   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; FLUORESCENCE; HELICONS; IONS; KINETIC ENERGY; KINETICS; LASER DIAGNOSTICS; LASER OPTICS; LASER PRODUCED PLASMAS; PLASMA DIAGNOSTICS; VELOCITY DISTRIBUTION;

AMBIPOLAR DIFFUSION; AXIAL DIRECTION; GAS PRESSURES; HELICON DISCHARGE; ION TEMPERATURE; LASER INDUCED FLUORESCENCE; PLASMA VOLUME; SPATIALLY RESOLVED;

ARGON LASERS;

EID: 78651111096     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/227/1/012035     Document Type: Conference Paper

References (11)

1. Chen F 1991 Plasma Phys. Controlled Fusion 33 339
2. Scime E, Keesee A and Boswell R 2008 Phys. Plasmas 15 058301
3. Clarenbach B, Krämer M and Lorenz B 2007 J. Phys. D: Appl. Phys. 40 5117
4. Kline J, Scime E, Boivin R, Keesee A and Sun X 2002 Phys. Rev Lett. 88 195002
5. Nakano T, Giapis K, Gottscho R, Lee T and Sadeghi N 1993 J. Vac. Sci. Technol. B 11 2046
6. Biliou C, Sun X, Choueiri E, Doss F, Scime E, Heard J, Spektor R and Ventura D 2005 Plasma Sources Sci. Technol. 14 766
7. Stevens J, Sowa M and Cecchi J 1995 J. Vac. Sci. Technol. A 13 2476
8. Shinohara S, Takechi S and Kawai Y 1996 Japan. J. Appl. Phys. 35 4503
9. Crintea D, Isenberg C, Luggenhölscher D and Czarnetzki U 2008 IEEE Trans. Plasma Sci. 36 1406
10. Celik Y et al to be published
11. Lieberman M and Lichtenberg A 2005 Principles of Plasma Discharges and Material Processing (New Jersey: Wiley-Interscience)