Operation of a permanent-magnetsexpanding plasma source connected to a large-volume diffusion chamber

Journal of Physics D: Applied Physics

Volumn 44, Issue 1, 2011, Pages

  Takahashi, Kazunori ^a   Itoh, Yuki ^a   Fujiwara, Tamiya ^a  

^a IWATE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON GAS PRESSURE; DIFFUSION CHAMBER; EXPANDING PLASMAS; MAGNETIC FIELD LINE; PERMANENT MAGNET ARRAY; PLASMA PRODUCTION; POTENTIAL DROP; RF-POWER; SUPERSONIC ION BEAMS; VOLUME DIFFUSION;

ARGON; BEAM PLASMA INTERACTIONS; DROPS; ION BEAMS; ION BOMBARDMENT; IONS; MAGNETIC DEVICES; MAGNETIC FIELDS; PERMANENT MAGNETS; PLASMA SIMULATION; PLASMA SOURCES;

DIFFUSION;

EID: 78650646037     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/1/015204     Document Type: Article

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