Ion beam formation in a low-pressure geometrically expanding argon plasma

Applied Physics Letters

Volumn 91, Issue 24, 2007, Pages

  Corr, C S ^a   Zanger, J ^a   Boswell, R W ^a   Charles, C ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ION BEAMS; PRESSURE EFFECTS;

ION BEAM ENERGY; POTENTIAL GRADIENTS; SUPERSONIC ION BEAM;

INDUCTIVELY COUPLED PLASMA;

EID: 37149041644     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2823575     Document Type: Article

References (16)

1. G. Hairapetian and R. L. Stenzel, Phys. Fluids B 3, 899 (1991) and references therein.
2. W. M. Manheimer and R. F. Fernsler, IEEE Trans. Plasma Sci. 29, 75 (2001).
3. C. Charles and R. W. Boswell, Appl. Phys. Lett. 82, 1356 (2003).
4. C. Charles and R. W. Boswell, Phys. Plasmas 11, 1706 (2004).
5. C. Charles and R. W. Boswell, Phys. Plasmas 11, 3808 (2004).
6. M. A. Lieberman and C. Charles, Phys. Rev. Lett. 97, 045003 (2006).
7. M. A. Lieberman, C. Charles, and R. W. Boswell, J. Phys. D 39, 3294 (2006).
8. C. Charles, Plasma Sources Sci. Technol. 16, R1 (2007).
9. N. Plihon, C. S. Corr, and P. Chabert, Appl. Phys. Lett. 86, 091501 (2005).
10. N. Plihon, P. Chabert, and C. S. Corr, Phys. Plasmas 14, 013506 (2007).
11. K. P. Shamrai, Y. V. Virko, V. F. Virko, and A. I. Yakimeno, 42nd AIAA, 2006 (unpublished) p. 4845.
12. A. Dunaevsky, Y. Raitses, and N. J. Fisch, Appl. Phys. Lett. 88, 251502 (2006).
13. C. Charles, A. W. Degeling, T. E. Sheridan, J. H. Harris, M. A. Lieberman, and R. W. Boswell, Phys. Plasmas 7, 5232 (2000).
14. K. T. A. L. Burn, W. J. Goedheer, and D. C. Schram, J. Appl. Phys. 90, 2162 (2001).
15. C. Charles, R. W. Boswell, A. Bouchoule, C. Laure, and P. Ranson, J. Vac. Sci. Technol. A 9, 661 (1991).
16. C. Charles, R. W. Boswell, and R. K. Porteous, J. Vac. Sci. Technol. A 10, 398 (1992).