Sandwiched electromagnetic vibration energy harvester based on MEMS technology

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

Volumn 8, Issue 6, 2010, Pages 510-515

  Wang, Pei Hong ^a   Liu, Hui Ting ^a   Yang, Zhuo Qing ^b   Dai, Xu Han ^b   Zhao, Xiao Lin ^b  

^a ANHUI UNIVERSITY   (China)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Electromagnetic; Micro electro mechanical system; Sandwiched structure; Vibration energy harvesting

Indexed keywords

COPPER COILS; ELECTRICAL CHARACTERISTIC; ELECTROMAGNETIC; ELECTROMAGNETIC ENERGY; ELECTROMAGNETIC VIBRATIONS; INDUCED VOLTAGES; INPUT VIBRATIONS; INSULATION LAYERS; LOAD VOLTAGES; MAXIMUM LOAD; MECHANICAL ENERGIES; MEMS TECHNOLOGY; MICRO ELECTRO MECHANICAL SYSTEM; NDFEB PERMANENT MAGNET; NOVEL DESIGN; POWER ENERGY; RESONANT FREQUENCIES; SANDWICHED STRUCTURE; SILICON MICROMACHINING; SYMMETRICAL ARRANGEMENT; TWO LAYERS; VIBRATION AMPLITUDE; VIBRATION CHARACTERISTICS; VIBRATION ENERGY HARVESTING; VIBRATION EXCITATION;

ACCELERATION; ELECTROMAGNETIC WAVES; ELECTROMAGNETISM; FABRICATION; HARVESTERS; MAGNETIC DEVICES; MAGNETIC FIELDS; MAGNETIC MATERIALS; MECHANICAL ENGINEERING; NATURAL FREQUENCIES; NEODYMIUM ALLOYS; PERMANENT MAGNETS; POLYIMIDES; REACTIVE ION ETCHING; VIBRATIONS (MECHANICAL);

ENERGY HARVESTING;

EID: 78650505595     PISSN: 16726030     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)

1. Ge Wenxun, Cong Peng. Trends and frontiers of MEMS[J]. Nanotechnology and Precision Engineering, 2007, 5(3): 182-189 (in Chinese).
2. Priya S, Inman D J. Energy Harvesting Technologies[M]. New York: Springer Publishing Company, Incorporated, 2009.
3. Mateu L, Moll F. Review of energy harvesting techniques and applications for microelectronics[J]. Proceedings of SPIE-The International Society for Optical Engineering, 2005, 5837: 359-373.
4. Roundy S, Wright P K, Rabaey J. A study of low level vibrations as a power source for wireless sensor nodes[J]. Computer Communications, 2003, 26(11): 1131-1144.
5. Williams C B, Yates R B. Analysis of a micro-electric generator for microsystems[J]. Sensors and Actuators A: Physical, 1996, 52(1/2/3): 8-11.
6. Ching N N H, Wong H Y, Li W J, et al. A laser-micromachined multi-modal resonating power transducer for wireless sensing systems[J]. Sensors and Actuators A: Physical, 2002, 97/98: 685-690.
7. Wen Zhongquan, Wen Zhiyu, Chen Guangyan, et al. Calculation and simulation of spring-mass system for micro vibration power generator[J]. Opt Precision Eng, 2003, 11(1): 45-48(in Chinese).
8. Pan C T, Hwang Y M, Hu H L, et al. Fabrication and analysis of a magnetic self-power microgenerator[J]. Journal of Magnetism and Magnetic Materials, 2006, 304(1): 394-396.
9. Beeby S P, Torah R N, Tudor M J, et al. A micro electromagnetic generator for vibration energy harvesting[J]. J Micromech Microeng, 2007, 17(7): 1257-1265.
10. Wang P H, Tanaka K, Sugiyama S, et al. A micro electromagnetic low level vibration energy harvester based on MEMS technology[J]. Microsyst Technol, 2009, 15(6): 941-951.
11. Beeby S P, Tudor M J, White N M. Energy harvesting vibration sources for microsystems applications[J]. Measurement Science and Technology, 2006, 17(12): R175-R195.
12. Arnold D P. Review of microscale magnetic power generation[J]. IEEE Transactions on Magnetics, 2007, 43(11): 3940-3951.
13. Fang Huabin. Research on Piezoelectric Energy Harvester Based on MEMS Technology[D]. Shanghai: Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, 2007 (in Chinese).
14. Wen Bangchun, Li Yinong, Han Qingkai. Analytic Method in Nonlinear Vibration Theory and Its Application in Engineering[M]. Shenyang: Northeastern University Press, 2001 (in Chinese).
15. Wang Peihong, Dai Xuhan, Fang Dongming, et al. Design and electromagnetic property simulation of micro electromagnetic vibration energy harvester[J]. Journal of Hefei University of Technology, 2008, 31(4): 518-521, 526 (in Chinese).