Semiconductor sensor layer in SAW gas sensors configuration

Acta Physica Polonica A

Volumn 118, Issue 6, 2010, Pages 1153-1157

  Hejczyk, T ^a   Urbanczyk M ^b   Jakubik, W P ^b  

^a WASKO SA   (Poland)

^b SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

GAS DETECTORS;

CATALYTIC LAYERS; PIEZOELECTRIC MEDIUM; RAYLEIGH; SAW GAS SENSORS; SEMICONDUCTOR SENSORS; SENSOR LAYERS; THIN SEMICONDUCTOR FILMS;

CHEMICAL SENSORS;

EID: 78650448313     PISSN: 05874246     EISSN: 1898794X     Source Type: Journal    
DOI: 10.12693/APhysPolA.118.1153     Document Type: Article

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