Bilayer structures of NiOx and Pd in surface acoustic wave and electrical gas sensor systems

Acta Physica Polonica A

Volumn 116, Issue 3, 2009, Pages 315-320

  Jakubik, W P ^a   Urbanczyk M ^a   MacIak, E ^a   Pustelny, T ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; CARBON; CARBON MONOXIDE; CHEMICAL SENSORS; GAS DETECTORS; GAS SENSING ELECTRODES; MICROELECTRODES; NICKEL OXIDE; NITROGEN OXIDES; SUBSTRATES;

DIFFERENTIAL FREQUENCY; GAS SENSING APPLICATIONS; HYDROGEN CONCENTRATION; HYDROGEN SENSITIVITY; PLANAR MICROELECTRODE ARRAYS; SIMULTANEOUS MONITORING; SURFACE ACOUSTIC WAVES; TECHNOLOGICAL PROCESS;

ACOUSTIC WAVE PROPAGATION;

EID: 70349675154     PISSN: 05874246     EISSN: 1898794X     Source Type: Journal    
DOI: 10.12693/APhysPolA.116.315     Document Type: Article

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