Impedance measurements for determination of elastic and piezoelectric coefficients of films

Advances in Applied Ceramics

Volumn 109, Issue 3, 2010, Pages 156-161

  Pardo, L ^a   Jimenez R ^a   Garcia A ^a   Brebol K ^b   Leighton, G ^c   Huang, Z ^c  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b Limiel ApS ^*  (Denmark)

^c CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Cantilevers; Elastic properties; Electromechanical resonance; FEA; Films; Iterative method; Material characterisation; Piezoelectrics; PZT

Indexed keywords

CANTILEVERS; ELASTIC PROPERTIES; ELECTROMECHANICAL RESONANCES; FEA; MATERIAL CHARACTERISATION; PIEZOELECTRICS; PZT;

ELASTICITY; ELECTRIC IMPEDANCE MEASUREMENT; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; NATURAL FREQUENCIES; PIEZOELECTRIC CERAMICS; PIEZOELECTRICITY; SUBSTRATES; THICK FILMS;

ITERATIVE METHODS;

EID: 78650336462     PISSN: 17436753     EISSN: 17436761     Source Type: Journal    
DOI: 10.1179/174367509X12502621261497     Document Type: Article

References (10)

1. 'IEEE standard on piezoelectricity', ANSI/IEEE Std, 176-1987.
2. 'Piezoelectric properties of ceramic materials and components. Part 2: methods of measurement- low power', European Standard CENELEC, EN 50324-2.
3. C. Alemany, L. Pardo, B. Jiménez, F. Carmona, J.Mendiola and A. M. González: 'Automatic iterative evaluation of complexmaterial constants in piezoelectric ceramics', J. Phys. D, Appl. Phys., 1994, 27, 148.
4. C. Alemany, A. M. Gonzá lez, L. Pardo, B. Jiménez, F. Carmona and J. Mendiola: 'Automatic determination of complex constants of piezoelectric lossy materials in the radial mode', J. Phys. D, Appl. Phys., 1995, 28, 945-956.
5. L. Pardo, M. Algueró and K. Brebøl: 'A non-standard shear sample for the matrix characterization of piezoceramics and its validation study by finite element analysis', J. Phys. D, Appl. Phys., 2007, 40, 2162-2169.
6. M. Lucas, T. Olding, M. Sayer, R. Tasker and S. Sherrit: 'Thickness mode material constant of a supported piezoelectric film', J. Appl. Phys., 1999, 85, (5), 2835.
7. Z. Huang, G. Leighton, R. Wright, F. Duval, H. C. Chung, P. Kirby and R. W. Whatmore: 'Determination of piezoelectric coefficients and elastic constant of thin films by laser scanning vibrometry techniques', Sensors. Actuators A, 2007, 135, 660-665.
8. S. Wang, W. Li, K. Wakabayashi and M. Esashi: 'Deep reactive ion etching of lead zirconate titanate using sulphur hexafluoride gas', J. Am. Ceram. Soc., 1999, 82, (5), 1339-1341.
9. J. F. Blackburn and M. G. Cain: 'Non-linear piezoelectric resonance analysis using burst mode: a rigorous solution', J. Phys. D, Appl. Phys., 2007, 40, (19), 227.
10. ATILA user's manual, 1997 Institut Superieur d'Electronique du Nord, Acoustics Laboratory.