Annealing effect on planar waveguides in LiNbO 3 produced by oxygen ion implantation

Applied Surface Science

Volumn 257, Issue 6, 2011, Pages 1918-1922

  Liu, Xiu Hong ^a   Huang, Qing ^a   Zhao, Jin Hua ^a   Liu, Peng ^a   Wang, Xue Lin ^a   Du, Ji Fu ^b   Huang, Ning Kang ^b  

^a SHANDONG UNIVERSITY   (China)

^b SICHUAN UNIVERSITY   (China)

Author keywords

Annealing; Ion implantation; Lithium niobate; Waveguides

Indexed keywords

ION IMPLANTATION; IONS; LITHIUM COMPOUNDS; NIOBIUM COMPOUNDS; OXYGEN; PLANAR WAVEGUIDES; REFRACTIVE INDEX; WAVEGUIDES;

IMPLANTED SAMPLES; LITHIUM NIOBATE; NEAR SURFACE REGIONS; NEAR-FIELD IMAGES; OXYGEN ION IMPLANTATION; PRISM COUPLING METHOD; STOICHIOMETRIC LITHIUM NIOBATE; TRANSMISSION SPECTRUMS;

ANNEALING;

EID: 78650287165     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.09.026     Document Type: Article

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