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Journal of Vacuum Science and Technology B

Volumn 28, Issue 6, 2010, Pages

Sub-10 nm patterning of gold nanostructures on silicon-nitride membranes for plasmon mapping with electron energy-loss spectroscopy

(5) Koh, Ai Leen a McComb, David W a Maier, Stefan A a Low, H Y b Yang, Joel K W b

a IMPERIAL COLLEGE LONDON (United Kingdom)

b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; ELECTRON BEAM LITHOGRAPHY; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; GOLD COMPOUNDS; NANOSTRUCTURES; PLASMONICS; SILICON NITRIDE; SURFACE PLASMON RESONANCE; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON ENERGY-LOSS SPECTROSCOPIES; GOLD NANOSTRUCTURES; HIGH-RESOLUTION ELECTRON BEAM LITHOGRAPHY; LIFT OFFS; METAL NANOSTRUCTURE; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SILICON NITRIDE MEMBRANE; SUB 10 NM; SURFACE-PLASMON; SURFACE-PLASMON RESONANCE;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 78650163919 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3501351 Document Type: Article

Times cited : (26)

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