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Volumn 205, Issue 5, 2010, Pages 1455-1459
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In situ accelerated micro-wear - A new technique to fill the measurement gap
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Author keywords
Amorphous carbon; MEMS; Micro wear; Microtribology; Nanotribology
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Indexed keywords
A-C FILM;
A-C:H THIN FILM;
CONSTANT LOADS;
EXPERIMENTAL SECTION;
EXPERIMENTAL SETUP;
FLOAT GLASS;
IN-SITU;
MICRO-WEAR;
MICROTRIBOLOGY;
MOLYBDENUM DISULPHIDE;
MULTI-LAYER-COATING;
MULTI-LAYERED;
NANO-SCRATCH;
NANOMECHANICAL TESTS;
OPERATIONAL PRINCIPLES;
TA-C FILM;
TANGENTIAL FORCE;
AMORPHOUS CARBON;
FILM PREPARATION;
NANOTRIBOLOGY;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON;
THIN FILMS;
VAPOR DEPOSITION;
COPPER;
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EID: 78649968098
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2010.07.109 Document Type: Article |
Times cited : (11)
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References (21)
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