Nonlinear parameter estimation technique for kinetic analysis of thermal desorption data

Surface Science

Volumn 364, Issue 2, 1996, Pages 199-218

  Russell, N M ^a   Ekerdt, J G ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Carbon; Desorption kinetics; Diethylsilane; Hydrides; Hydrogen; Low index single crystal surfaces; Models of surface chemical reactions; Models of surface kinetics; Semi empirical models and model calculations; Semiconducting surfaces; Silicon

Indexed keywords

CALCULATIONS; CARBON; CHEMICAL REACTIONS; HYDRIDES; HYDROGEN; MATHEMATICAL MODELS; PARAMETER ESTIMATION; REACTION KINETICS; SEMICONDUCTING SILICON; STATISTICAL METHODS; SURFACES; TEMPERATURE PROGRAMMED DESORPTION;

DIETHYLSILANE; LOW INDEX SINGLE CRYSTAL SURFACES; SEMI EMPIRICAL MODELS; SEMICONDUCTING SURFACES; SURFACE CHEMICAL REACTIONS MODELS; SURFACE KINETICS MODELS; THERMAL DESORPTION; THERMAL DESORPTION SPECTROSCOPY;

DESORPTION;

EID: 0030214099     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(96)00593-6     Document Type: Article

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