The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties

South African Journal of Science

Volumn 106, Issue 11-12, 2010, Pages

  Msomi, Velaphi ^a   Nemraoui, Oaisin ^b  

^a CAPE PENINSULA UNIVERSITY OF TECHNOLOGY   (South Africa)

^b UNIVERSITY OF ZULULAND   (South Africa)

Author keywords

Deposition temperature; Microstructure; Thermochromism; Thin films; Vanadium dioxide

Indexed keywords

CRYSTALLIZATION; FILM; LIME; MICROSTRUCTURE; PHYSICAL PROPERTY; TEMPERATURE EFFECT; VANADIUM;

EID: 78649863275     PISSN: 00382353     EISSN: 19967489     Source Type: Journal    
DOI: 10.4102/sajs.v106i11/12.297     Document Type: Article

References (16)

1. Chain EE. Preparation and characteristics of VO2 thin film micro-bolometer application. J Vac Sci Technol A. 1986;4:432.
2. Chain EE. Effects of oxygen in ion-beam sputter deposition of vanadium oxide. J Vac Sci Technol A. 1987;5:1836.
3. Case FC. Influence of ion beam parameters on the electrical and optical properties of ion-assisted reactively evaporated vanadium dioxide thin films. J Vac Sci Technol A. 1987;5:1762-1766.
4. Remka L, Walser RM, Bene RV. Optical switchable thin films. Thin Solid Films. 1979;61:73.
5. Bubert H, Jenett H. Surface and thin film analysis. Berlin: Wiley-VCH Verlag, 1992; p. 103-109.
6. Morin F. Oxides which show a metal-to-insulator transition at the Neel temperature. Phys Rev Lett. 1959;3:34.
7. De Waal HS. Compound phase formation at AU-A1 interfaces. New York: Addison-Wesley Publishing Company, 1995; p. 59-78.
8. Xu G, Jin P, Tazawa M, Yoshimura K. Thickness dependence of optical properties of VO2 thin films epitaxially grown on sapphire (0001). Appl Surf Sci. 2005;244:449-452.
9. Warren BE. X-ray diffraction. New York: Addison-Wesley Publishing Company, 1969; p. 61-83.
10. Introduction to X-ray diffraction [homepage on the Internet]. No date [cited 2007 Aug 23]. Available from: http://www.panalytical.com/index.cfm?pid= 135
11. Introduction to spectrophotometry [homepage on the Internet]. No date [cited 2007 Aug 16]. Available from: http://www.varianinc.com.cn/products/ spectr/uv/brochure/1604.pdf
12. Introduction to spectrophotometry [homepage on the Internet]. No date [cited 2007 Aug 22]. Available from: http://webche.ent.ohiou.edu/che416/UV-w02. html
13. Vernardou D, Manning TD, Parkin IP, et al. Intelligent window coatings: Atmospheric pressure chemical vapour deposition of tungsten-doped vanadium dioxide. Surf Coat Technol. 2004;188-189:250.
14. 2 thin film coatings by pulsed laser ablation. Opt Mater. 2000;15:41-45.
15. Golan G, Axelevitch A, Sigalov B, Gorenstein B. Metal insulator phase transition in vanadium oxide films. Microelectr J. 2003;34:255-258.
16. Kucharczyk D, Niklewski T. Accurate X-ray determination of the lattice parameters and the thermal expansion coefficients of VO near the transition temperature. J Appl Crystallogr. 1979;12:370.