Robust liquid metal collector mirror for EUV and soft X-ray plasma sources

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7802, Issue , 2010, Pages

  Fahy, Kenneth ^a   O'Reilly, Fergal ^a   Scally, Enda ^a   Sheridan, Paul ^a  

^a UNIVERSITY COLLEGE DUBLIN   (Ireland)

Author keywords

Collector mirror; EUV lithography; Extreme ultraviolet; Liquid metal; Semiconductor metrology; Soft X ray

Indexed keywords

COLLECTOR MIRROR; EUV LITHOGRAPHY; EXTREME ULTRAVIOLETS; SEMICONDUCTOR METROLOGY; SOFT X-RAY;

LIQUID METALS; METAL COATINGS; MIRRORS; OPTICAL TESTING; PROTECTIVE COATINGS; X RAYS;

METALS;

EID: 78649804532     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.860747     Document Type: Conference Paper

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