Gas phase modification of superhard carbon coatings deposited by pulsed DC-arc-process

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Grimm, Werner ^a   Weihnacht, Volker ^b  

^a INOVAP Vakuum und Plasmatechnik GmbH Dresden   (Germany)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

DLC; Pulsed dc arc; Vacuum arc

Indexed keywords

AMMONIA GAS; AMORPHOUS CARBON COATING; ANALYTICAL METHOD; CARBON COATING; COATING PROPERTIES; EVAPORATION PROCESS; FILM PROPERTIES; FRICTION AND WEAR; GAS FLOWRATE; GAS FLOWS; GASPHASE; PRESSURE RANGES; PULSED ARC; PULSED ARC DISCHARGE; PULSED DC; PULSED VACUUM ARC; STEEL SUBSTRATE; SUPERHARD; VACUUM ARCS;

ACETYLENE; AERODYNAMICS; AMORPHOUS CARBON; ARGON; FLOW OF GASES; GASES; HARD FACING; MACHINERY; VACUUM; VACUUM APPLICATIONS; VACUUM TECHNOLOGY; WELDS;

HARD COATINGS;

EID: 77954925204     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200931009     Document Type: Conference Paper

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