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Journal of Materials Science and Technology

Volumn 26, Issue 10, 2010, Pages 872-877

ZnO:Al films prepared by reactive mid-frequency magnetron sputtering with rotating cathode

(2) Hong, Ruijiang a Xu, Shuhua b

a SUN YAT SEN UNIVERSITY (China)

b SOUTH CHINA UNIVERSITY OF TECHNOLOGY (China)

Author keywords

Al doped zinc oxide; Mid frequency magnetron sputtering; Properties

Indexed keywords

AL-DOPED ZINC OXIDE; AZO FILMS; COLUMNAR STRUCTURES; DEPOSITION MODES; DEPOSITION PARAMETERS; ELECTRICAL AND OPTICAL PROPERTIES; GAS PRESSURES; GLASS SUBSTRATES; GRAIN SURFACE; MAGNETRON SPUTTERING PROCESS; METALLIC SURFACE; MID-FREQUENCY; OXYGEN PARTIAL PRESSURE; PROPERTIES; REDEPOSITION; ROTATING CATHODE; SUBSTRATE TEMPERATURE; TARGET SURFACE; ZNO; ZNO:AL FILMS;

ALUMINUM; ELECTRIC PROPERTIES; FILM PREPARATION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OXYGEN; ROTATION; SUBSTRATES; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 78649392898 PISSN: 10050302 EISSN: None Source Type: Journal
DOI: 10.1016/S1005-0302(10)60139-9 Document Type: Article

Times cited : (10)

References (15)

1
- 0021428475
- Minami T., Nanto H., Takata S. Jpn. J. Appl. Phys. 1984, 23:L280.
- (1984) Jpn. J. Appl. Phys. , vol.23
- Minami, T.¹ Nanto, H.² Takata, S.³

2
- 36549094294
- Jin Z.C., Hamberg I., Granqvist C.G. J. Appl. Phys. 1988, 64:5117.
- (1988) J. Appl. Phys. , vol.64 , pp. 5117
- Jin, Z.C.¹ Hamberg, I.² Granqvist, C.G.³

3
- 1942462571
- Bender M., Trube J., Stollenwerk J. Proc. SID 99 (San Jose) 1999, 841.
- (1999) Proc. SID 99 (San Jose) , pp. 841
- Bender, M.¹ Trube, J.² Stollenwerk, J.³

4
- 0000620017
- Coutts T.J., Mason T.O., Perkins J.D., Ginley D.S. Proc. Electrochem. Soc. 1999, 11:274.
- (1999) Proc. Electrochem. Soc. , vol.11 , pp. 274
- Coutts, T.J.¹ Mason, T.O.² Perkins, J.D.³ Ginley, D.S.⁴

5
- 0346270196
- Nishino J., Ohshio S., Kamata K. J. Am. Ceram. Soc. 1992, 75:3469.
- (1992) J. Am. Ceram. Soc. , vol.75 , pp. 3469
- Nishino, J.¹ Ohshio, S.² Kamata, K.³

6
- 0035480355
- Gordillo G., Calderón C. Sol. Energy Mater. Sol. Cells 2001, 69:251.
- (2001) Sol. Energy Mater. Sol. Cells , vol.69 , pp. 251
- Gordillo, G.¹ Calderón, C.²

7
- 0030259423
- Ardakani H.K. Thin Solid Films 1996, 287:280.
- (1996) Thin Solid Films , vol.287 , pp. 280
- Ardakani, H.K.¹

8
- 0031199025
- Ellmer K., Wendt R. Surf. Coat. Technol. 1997, 93:21.
- (1997) Surf. Coat. Technol. , vol.93 , pp. 21
- Ellmer, K.¹ Wendt, R.²

9
- 0030562199
- Fiddes A.J.C., Durose K., Brinkman A.W., Woods J., Coates P.D., Banister A.J. J. Cryst. Growth 1996, 159:210.
- (1996) J. Cryst. Growth , vol.159 , pp. 210
- Fiddes, A.J.C.¹ Durose, K.² Brinkman, A.W.³ Woods, J.⁴ Coates, P.D.⁵ Banister, A.J.⁶

10
- 0030192029
- Nishio K., Miyake S., Sei T., Watanabe Y., Tsuchiya T. J. Mater. Sci. 1996, 31:3651.
- (1996) J. Mater. Sci. , vol.31 , pp. 3651
- Nishio, K.¹ Miyake, S.² Sei, T.³ Watanabe, Y.⁴ Tsuchiya, T.⁵

11
- 0033170232
- Szyszka B. Thin Solid Films 1999, 351:164.
- (1999) Thin Solid Films , vol.351 , pp. 164
- Szyszka, B.¹

12
- 0035387550
- Silva M.F.V., Nicholls J.R. Surf. Coat. Technol. 2001, 142-144:934.
- (2001) Surf. Coat. Technol. , pp. 934
- Silva, M.F.V.¹ Nicholls, J.R.²

13
- 78649400857
- Heister U., Krempel-Hesse J., Szczyrbowski J., Teschner G., Bruch J., Brauer G. Thin Solid Films 1999, 27:351.
- (1999) Thin Solid Films , vol.27 , pp. 351
- Heister, U.¹ Krempel-Hesse, J.² Szczyrbowski, J.³ Teschner, G.⁴ Bruch, J.⁵ Brauer, G.⁶

14
- 78649415062
- Kukla R. Surf. Coat. Technol. 1997, 1:93.
- (1997) Surf. Coat. Technol. , vol.1 , pp. 93
- Kukla, R.¹

15
- 0038286276
- Hong R.J., Jiang X., Szyszka B., Sittinger B.V., Xu S.H., Werner W., Heide G. J. Cryst. Growth 2003, 253:117.
- (2003) J. Cryst. Growth , vol.253 , pp. 117
- Hong, R.J.¹ Jiang, X.² Szyszka, B.³ Sittinger, B.V.⁴ Xu, S.H.⁵ Werner, W.⁶ Heide, G.⁷

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