Composition-dependent characterization of Sb2Te3 thin films prepared by ion beam sputtering deposition

Chinese Physics Letters

Volumn 27, Issue 8, 2010, Pages

  Fan, Ping ^a   Zheng, Zhuang Hao ^a   Liang, Guang Xing ^a   Cai, Xing Min ^a   Zhang, Dong Ping ^a  

^a SHENZHEN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY; CARRIER CONCENTRATION; ION BEAMS; SEEBECK COEFFICIENT; SPUTTERING; SUBSTRATES; TELLURIUM COMPOUNDS; X RAY DIFFRACTION;

ATOMIC RATIO; B-Y IONS; BK7 GLASS; COMPOSITION RATIO; DEPOSITION PROCESS; GLASS SUBSTRATES; ION BEAM SPUTTERING DEPOSITION; OPTIMISATIONS; THERMOELECTRIC PROPERTIES; THIN-FILMS;

THIN FILMS;

EID: 78649343930     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/27/8/087201     Document Type: Article

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