Change in surface morphology of polytetrafluoroethylene by reactive ion etching

Radiation Physics and Chemistry

Volumn 80, Issue 2, 2011, Pages 253-256

  Takahashi, Tomohiro ^a   Hirano, Yuki ^a   Takasawa, Yuya ^a   Gowa, Tomoko ^a   Fukutake, Naoyuki ^a   Oshima, Akihiro ^b   Tagawa, Seiichi ^a,b   Washio, Masakazu ^a  

^a WASEDA UNIVERSITY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Plasma; PTFE; Reactive ion etching; Water repellency

Indexed keywords

CHARACTERIZATION STUDIES; CHEMICAL STRUCTURE; ETCHING RATE; NANO-FIBER STRUCTURE; NEEDLE-LIKE; PTFE; REACTIVE ION; SUPERHYDROPHOBIC; WATER REPELLENCY;

CONTACT ANGLE; IONS; MORPHOLOGY; PLASMAS; POLYTETRAFLUOROETHYLENES; SURFACE MORPHOLOGY; SURFACE ROUGHNESS;

REACTIVE ION ETCHING;

ARGON; FLUOROMETHANE; NANOFIBER; NITROGEN; OXYGEN; PEROXY RADICAL; POLITEF;

ARTICLE; CHEMICAL STRUCTURE; CONTACT ANGLE; CONTROLLED STUDY; EXPOSURE; HYDROPHOBICITY; SCANNING ELECTRON MICROSCOPY;

EID: 78649329794     PISSN: 0969806X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.radphyschem.2010.07.042     Document Type: Article

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