Ellipsometry characterization of hydrogenated amorphous silicon layers formed on textured crystalline silicon substrates

Applied Physics Express

Volumn 3, Issue 11, 2010, Pages

  Watanabe, Kouji ^a   Matsuki, Nobuyuki ^a   Fujiwara, Hiroyuki ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

A-SI:H; CRYSTALLINE SILICON SUBSTRATES; ELLIPSOMETRY MEASUREMENTS; HETEROJUNCTION SOLAR CELLS; HYDROGENATED AMORPHOUS SILICON; HYDROGENATED AMORPHOUS SILICON (A-SI:H); LAYER THICKNESS; SINGLE CRYSTALLINE SILICON; STRUCTURAL CHANGE; TEXTURED SUBSTRATES; TILT ANGLE; TILT ANGLE MEASUREMENT;

ANGLE MEASUREMENT; CRYSTALLINE MATERIALS; HETEROJUNCTIONS; HYDROGENATION; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS SILICON;

EID: 78549245817     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.3.116604     Document Type: Article

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