A micromachined combustor and its application to micro thermoelectric power generation

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn , Issue , 2002, Pages 1-6

  Zhang, Chunbo ^a   Najafi, Khalil ^a   Bernal, Luis P ^b   Washabaugh, Peter D ^b  

^a University of Michigan   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Diaphragm; Micromachined combustor; Power generation; Self sustained combustion; Thermoelectric

Indexed keywords

CATALYSIS; COMBUSTION; DIAPHRAGMS; HYDROGEN; MECHANICAL ENGINEERING; MEMS; MICROELECTROMECHANICAL DEVICES; PLATINUM; SUBSTRATES; THERMOELECTRIC POWER;

CATALYTIC COMBUSTION; COMBUSTION TEMPERATURES; GLASS SUBSTRATES; HYDROGEN FLOW RATE; MICROMACHINED COMBUSTORS; OUTPUT POWER LEVELS; SCALING EFFECTS; SILICON SUPPORT; SMALL SIZE; SUSTAINED COMBUSTION; TEMPERATURE GRADIENT; THERMAL CONDUCTANCE; THERMOELECTRIC; THICK DIELECTRICS;

COMBUSTORS;

EID: 78249267605     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-33272     Document Type: Conference Paper

References (9)

1. A. Mehra, A.A. Ayon, I.A. Waitz, and M.A. Schmidt, "Microfabrication of High-Temperature Silicon Devices Using Wafer Bonding and Deep Reactive Ion Etching", IEEE JMEMS, V8, I2 (1999), 152-160.
2. th AIAA Aerospace Sciences Meeting & Exhibit, Jan. 2001, Reno, NV, USA, AIAA-2001-0978.
3. th AIAA Aerospace Sciences Meeting & Exhibit, Jan. 2001, Reno, NV, USA, AIAA-2001-1087.
4. S. Schaevitz, A. Franz, K. Kensen, and M. Schmidt, "A Combustion-Based MEMS Thermoelectric Power Generator", Transducers'01, June 2001, Munich, Germany, 30-33.
5. C. Zhang, K. Najafi, L. Bernal, and P. Washabaugh, "An Integrated Combustor-Thermoelectric Micro Power Generator", Transducers'01, June 2001, Munich, Germany, 34-37.
6. D.J. Quiram, K.F. Jensen, M.A. Schmidt, "Package Level Integration of Silicon Microfabricated Reactors to Form a Miniature Reactor Test System", Solid-State Sensor and Actuator Workshop, Hilton Head, June 2000, 166-169.
7. D.V. McAllister, F. Cros, S.P. Davis, L.M. Matta, M.R. Prausnitz, and M.G. Allen, "Three-Dimensional Hollow Microneedle and Microtube Arrays", Transducers 99, 1098-1101.
8. A.Mehra, I.A.Waitz, "Development of a Hydrogen Combustor for a Microfabricated Gas Turbine Engine", Solid State Sensor and Actuator Workshop, Hilton Head Island, June, 1998, 35-40.
9. A.W.Van Herwaarden and P.M.Sarro, "Thermal Sensors Based on the Seebeck Effect", Sensors and Actuators, v10 n 3-4 Nov-Dec 1986, 321-346.