Bidirectional reflectance measurement of microstructural silicon surfaces

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2002, Pages 177-178

  Zhu, Qunzhi ^a   Shen, Yu Jiun ^b   Zhang, Zhuomin M ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 78249233845     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-32757     Document Type: Conference Paper

References (4)

1. Timans, P.J., Sharangpani, R., and Thakur, R.P.S., 2000, "Rapid Thermal Processing," in Handbook of Semiconductor Manufacturing Technology, Y. Nishi (ed.), Marcel Dekker, New York, pp. 201-286.
2. Shen, Y.J., Zhang, Z.M., Tsai, B.K., and DeWitt, D.P., 2001, "Bidirectional Reflectance Distribution Function of Rough Silicon Wafers," International Journal of Thermophysics, 22, pp. 1311-1326.
3. th International Heat Transfer Conference, August 18-23, Grenoble, France.
4. Parlik, E.D. (ed.), 1985, Handbook of Optical Constants of Solids, Academic Press, Orlando, FL.