Characterization of near-surface electrical properties of multi-crystalline silicon wafers

Solid-State Electronics

Volumn 55, Issue 1, 2011, Pages 29-36

  Drummond, P ^a   Kshirsagar, A ^a   Ruzyllo, J ^a  

^a The Pennsylvania State University   (United States)

Author keywords

Electrical characterization; Multi crystalline silicon; Near surface electrical properties; PCD

Indexed keywords

CELL MANUFACTURING; CRYSTALLOGRAPHIC ORIENTATIONS; ELECTRICAL CHARACTERIZATION; ELECTRICAL PARAMETER; ELECTRICAL PROPERTY; MINORITY CARRIER; MONITORING PROCESS; MULTI-CRYSTALLINE SILICON; NEAR SURFACE REGIONS; NEAR-SURFACE; PCD; PHOTOCONDUCTIVE DECAY; SAW DAMAGES; SEMICONDUCTOR SUBSTRATE; SI SOLAR CELLS; SI SURFACES; SI WAFER; SOLAR-CELL APPLICATIONS; SURFACE-TEXTURING;

CARRIER MOBILITY; CRYSTALLINE MATERIALS; ELECTRIC PROPERTIES; GRAIN BOUNDARIES; MANUFACTURE; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLAR CELLS; WET ETCHING;

SILICON WAFERS;

EID: 78149285432     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2010.09.005     Document Type: Article

References (18)

1. T.M. Bruton General trends about photovoltaics based on crystalline silicon Solar Energy Mater Solar Cells 72 2002 3 10
2. Angermann H, Sievert W, Klimm C, Zimmermann KU. In: Proc 9th intern symp on ultra-clean proc of semicond. Surfaces, UCPSS 2008, Bruges, Belgium; 2008.
3. P. Roman, J. Staffa, S. Fakhouri, M. Brubaker, E. Kamieniecki, and J. Ruzyllo Surface dopant concentration monitoring using noncontact surface charge profiling J Appl Phys 83 1998 2297 2300
4. Roman P, Brubaker M, Staffa J, Kamieniecki E, Ruzyllo J. Non-contact monitoring of electrical characteristics of silicon surface and near-surface region. Characterization and metrology for ULSI technology, vol. 449; 2000. p. 250-4.
5. S. Narasimha, and A. Rohatgi Fabrication and characterization of 186% efficiency multicrystalline silicon solar cells IEEE Transactions on Electron Devices 45 1998 1776 1783
6. Stocks M, Blakers A, Cuevas A. Multicrystalline silicon solar cells with low rear surface recombination. In: 26th PVSC, September 30-October 3, Anaheim, CA; 1997. p. 67-70.
7. R.B. Beck, M. Patyra, J. Ruzyllo, and A. Jakubowski Oxygen pressure as a parameter in the d.c. plasma anodization of silicon Thin Solid Films 67 1980 261 264
8. S.M. Sze Physics of semiconductor devices 2nd ed. 1981 John Wiley & Sons New York
9. D.K. Schroder Semiconductor material and device characterization 3rd ed. 2006 John Wiley & Sons New York
10. P. Drummond, S. Ramani, and J. Ruzyllo Monitoring of semiconductor surfaces using photoconductance decay (PCD) method ECS Transactions-216th Meeting of the Electrochemical Society 25 2009 361 366
11. W. Kern Chemical etching of silicon, germanium, gallium arsenide, and gallium Phosphide RCA Rev 39-2 1978 278 308
12. Marstein ES, Solheim HJ, Wright DN, Holt A. In: Conference record of the thirty-first IEEE photovoltaic specialists conference, Lake buena Vista, FL, USA; 3-7 January 2005. p. 1309-12.
13. P. Panek, M. Lipinski, and J. Dutkiewicz Texturization of multicrystalline silicon by wet chemical etching for silicon solar cells J Mater Sci 40 2005 1459 1463
14. Y. Ein-Eli, N. Gordon, and D. Starosvetsky Reduced light reflection of textured multicrystalline silicon via NPD for solar cells applications Solar Energy Mater Solar Cells 90 2006 1764 1772
15. U. Gangopadhyay, S.K. Dhungel, P.K. Basu, S.K. Dutta, H. Saha, and J. Yi Comparative study of different approaches of multicrystalline silicon texturing for solar cell fabrication Solar Energy Mater Solar Cells 91 2007 285 289
16. Panek Opto-Electron Rev 11-14 2003 269 275
17. Van der Heide ASH, Bultman JH, Goris MJAA, Hoornstra J. Influence of grain orientation on contact resistance at high emitter resistances, investigated for alkaline and acid saw damage removal. In: 3rd World conference on photovoltaic energy conversion, Osaka, Japan, May 11-13; 2003.
18. Einhaus R, Vazsonyi E, Szlufzik J, Nijs J, Mertens R. In: Conference record of the twenty sixth IEEE photovoltaic specialists conference, September 30-October 3, Anaheim, CA, USA; 1997. p. 167-70.