Bonding of planar poly (methyl methacrylate) (PMMA) nanofluidic channels using thermal assisted ultrasonic bonding method

Microsystem Technologies

Volumn 16, Issue 12, 2010, Pages 2043-2048

  Zhang, Zongbo ^a   Luo, Yi ^b   Wang, Xiaodong ^b   He, Shengqiang ^b   Meng, Fantao ^b   Wang, Liding ^b  

^a CHINA UNIVERSITY OF PETROLEUM   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING STRENGTH; BONDING TECHNIQUES; BONDING TIME; GLASS TRANSITION TEMPERATURE; HOT PLATES; LOW-AMPLITUDE; MICROSCALE CHANNEL; NANO CHANNELS; NANOFLUIDIC CHANNEL; POLYMER NANOCHANNELS; PREHEATING TEMPERATURE; ULTRASONIC BONDING; ULTRASONIC VIBRATION;

DIFFUSION BONDING; ESTERS; NANOFLUIDICS; POLYMERS; PREHEATING; ULTRASONICS;

GLASS TRANSITION;

EID: 78049455347     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1140-7     Document Type: Article

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