Chemical vapor deposition of aluminum oxide thin films

Journal of Chemical Education

Volumn 87, Issue 10, 2010, Pages 1102-1104

  Vohs, Jason K ^a   Bentz, Amy ^a   Eleamos, Krystal ^a   Poole, John ^a   Fahlman, Bradley D ^b  

^a SAINT VINCENT COLLEGE   (United States)

^b CENTRAL MICHIGAN UNIVERSITY   (United States)

Author keywords

Hands on learning manipulatives; Inorganic chemistry; Laboratory equipment apparatus; Laboratory instruction; Materials science; Nanotechnology; Physical chemistry; Surface science; Upper division undergraduate

Indexed keywords

EID: 78049453747     PISSN: 00219584     EISSN: None     Source Type: Journal    
DOI: 10.1021/ed100391p     Document Type: Article

References (6)

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3. Blittersdorf, S.; Bahlawane, N.; Kohse-Hoinghaus, K.; Atakan, B.; Muller, J. Chem. Vap. Deposition 2003, 9, 194-198.
4. Lux, B.; Colombier, H.; Altena, H.; Sternberg, K. Thin Solid Films 1986, 138, 49-64.
5. Groner, M. D.; Fabreguette, F. H.; Elam, J. W.; George, S. M. Chem. Mater. 2004, 16, 639-645.
6. Ajayi, O. B.; Akanni, M. S.; Lambi, J. N.; Burrow, H. D.; Osasona, O.; Podor, B. P. Thin Solid Films 1986, 138, 91-95.