Silicon nanowire-based nanoactuator

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2, Issue , 2003, Pages 879-880

  Chau, M ^a   Englander, O ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuators; Chromium; Heating; Micromechanical devices; Nanostructures; Nanotechnology; Production; Scanning electron microscopy; Silicon; Temperature

Indexed keywords

ACTUATORS; CHROMIUM; HEATING; HEATING EQUIPMENT; METAL COATINGS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURES; NANOWIRES; PRODUCTION; SCANNING ELECTRON MICROSCOPY; SILICON; TEMPERATURE; THERMAL EXPANSION;

LOCALIZED SYNTHESIS; MICROHEATER; MICROMECHANICAL DEVICE; NANOACTUATORS; POWER INPUT; SILICON NANOWIRES; THICK LAYERS;

NANOTECHNOLOGY;

EID: 78049289740     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2003.1231055     Document Type: Conference Paper

References (4)

1. Ongi Englander, et al., "Localized synthesis of silicon nanowires," 12th Int. Conference on Solid State Sensors and Actuators, Transducer's 03, Boston, to appear.
2. Y. Wu et al., "Inorganic semiconductor nanowires: rational growth, assembly, and novel properties," Chem. Eur. J. pp. 1261-1268, 2002.
3. X. Duan et al., "Indium phosphide nanowires as building blocks for nanoscale electronics and optoelectronic devices," Nature, 409, pp. 66-68, 2001.
4. W. Riethmuller and W. Benecke, "Thermally excited silicon microactuators," IEEE Transactions on Electron Devices, Vol. 35, No. 6, pp. 758-762.