Laser interference lithography and nano-imprint techniques for lower reflection transparent conducting oxide hybrid films

International Journal of Precision Engineering and Manufacturing

Volumn 11, Issue 4, 2010, Pages 619-622

  Chou, Ta Hsin ^a   Cheng, Kuei Yuan ^a   Su, Chih Chieh ^a   Chang, Tien Li ^a   Hsieh, Chih Wei ^a   Tsai, Jen Hui ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Laser interference lithography; Low reflection; Nanoimprint; Transparent conducting oxide

Indexed keywords

EID: 78049266390     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-010-0072-6     Document Type: Article

References (7)

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