Impact of crystallization behavior of Srx Tiy O z films on electrical properties of metal-insulator-metal capacitors with TiN electrodes

Applied Physics Letters

Volumn 97, Issue 16, 2010, Pages

  Pawlak, M A ^a   Kaczer, B ^a   Kim, M S ^a   Popovici, M ^a   Tomida, K ^a   Swerts, J ^a   Opsomer, K ^a   Polspoel, W ^a   Favia, P ^a   Vrancken, C ^a   Demeurisse, C ^a   Wang, W C ^b   Afanas'Ev, V V ^b   Vandervorst, W ^a   Bender, H ^a   Debusschere, I ^a   Altimime, L ^a   Kittl, J A ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION RANGES; CRYSTALLIZATION BEHAVIOR; ELECTRICAL PROPERTY; IN-BAND; METAL-INSULATOR-METAL CAPACITORS; OXIDE THICKNESS; STOICHIOMETRIC FILMS; TIN ELECTRODES;

ATOMIC LAYER DEPOSITION; CAPACITORS; CRYSTALLIZATION; ELECTRIC PROPERTIES; METAL INSULATOR BOUNDARIES; OXIDE FILMS; PEROVSKITE; TITANIUM NITRIDE;

ELECTROLYTIC CAPACITORS;

EID: 77958496563     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3505323     Document Type: Article

References (7)

1. J. A. Kittl, Microelectron. Eng. 0167-9317 86, 1789 (2009). 10.1016/j.mee.2009.03.045
2. C. S. Kang, C. S. Hwang, H. J. Cho, B. T. Lee, S. O. Park, J. W. Kim, H. Horii, S. I. Lee, Y. B. Koh, and M. Y. Lee, Jpn. J. Appl. Phys. 0021-4922 35, 4890 (1996). 10.1143/JJAP.35.4890
3. S. W. Lee, O. S. Kwon, J. H. Han, and C. S. Hwang, Appl. Phys. Lett. 0003-6951 92, 222903 (2008). 10.1063/1.2939102
4. N. Menou, X. P. Wang, B. Kaczer, W. Polspoel, M. Popovici, K. Opsomer, M. A. Pawlak, W. Knaepen, C. Detavernier, T. Blomberg, D. Pierreux, J. Swerts, J. W. Maes, P. Favia, H. Bender, B. Brijs, W. Vandervorst, S. Van Elshocht, D. J. Wouters, S. Biesemans, and J. A. Kittl, Tech. Dig.-Int. Electron Devices Meet. 0163-1918 2008, 929.
5. S. N. Ruddlesden and P. Popper, Acta Crystallogr. 1600-5368 11, 54 (1958). 10.1107/S0365110X58000128
6. D. P. Norton, Mater. Sci. Eng. R. 0927-796X 43, 139 (2004). 10.1016/j.mser.2003.12.002
7. G. Lucovsky, J. Non-Cryst. Solids 0022-3093 303, 40 (2002). 10.1016/S0022-3093(02)00962-6