Design and analysis of MEMS based PVDF ultrasonic transducers for vascular imaging

Sensors

Volumn 10, Issue 9, 2010, Pages 8740-8750

  Chandrana, Chaitanya ^a,b   Talman, James ^c   Pan, Tao ^a   Roy, Shuvo ^d   Fleischman, Aaron ^a  

^a LERNER RESEARCH INSTITUTE   (United States)

^b Cleveland State University   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

High frequency ultrasound imaging; Parasitic capacitance; Ultrasound transducer

Indexed keywords

DESIGN AND ANALYSIS; HIGH-FREQUENCY ULTRASOUND IMAGING; MICRO ELECTRO MECHANICAL SYSTEM; PARASITIC CAPACITANCE; POLYVINILIDENE FLUORIDE; SINGLE ELEMENT TRANSDUCERS; ULTRASOUND IMAGING; ULTRASOUND TRANSDUCERS;

CAPACITANCE; MEMS; ULTRASONIC IMAGING; ULTRASONIC TRANSDUCERS;

TRANSDUCERS;

POLYVINYL DERIVATIVE; POLYVINYLIDENE FLUORIDE;

ARTICLE; CHEMISTRY; ENDOSCOPIC ECHOGRAPHY; EQUIPMENT DESIGN; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; TRANSDUCER;

EQUIPMENT DESIGN; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; POLYVINYLS; TRANSDUCERS; ULTRASONOGRAPHY, INTERVENTIONAL;

EID: 77958015912     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s100908740     Document Type: Article

References (13)

1. Foster, F.; Pavlin, C.; Harasiewicz, K.; Christopher, D.; Turnbull, D. Advances in Ultrasound Biomicroscopy. Ultrasound Med. Biol. 2000, 26, 1-27.
2. Lockwood, G.; Turnbull, D.; Christopher, D.; Foster, F. Beyond 30 MHz-Applications of High-Frequency Ultrasound Imaging. IEEE Eng. Med. Biol. 1996, 15, 60-71.
3. Zhang, Q.; Djuth, F.; Zhou, Q.; Hu, C.; Cha, J.; Shung, K. High Frequency Broadband Pzt Thick Film Ultrasonic Transducers for Medical Imaging Applications. Ultrasonics 2006, 44, E711-E715.
4. Fleischman, A.; Modi, R.; Nair, A.; Talman, J.; Lockwood, G.; Roy, S. Miniature High Frequency Focused Ultrasonic Transducers for Minimally Invasive Imaging Procedures. Sens. Actuat. 2003, 103, 76-82.
5. Caronti, A.; Caliano, G.; Carotenuto, R.; Savoia, A.; Pappalardo, M.; Cianci, E.; Foglietti, V. Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays for Medical Imaging. Microelectronics J. 2006, 37, 770-777.
6. Shung, K.; Zipparo, M. Ultrasonic Transducers and Arrays. IEEE Eng. Med. Biol. Mag. 1996, 15, 20-30.
7. Lockwood, G.; Hazard, C. Development of Small Aperture Polymer Transducers for High Frequency Imaging. In Proceeding of the Ultrasonics Symposium, Toronto, ON, Canada, 1997.
8. Day, R.A. PVDF and Array Transducers. NDT net. 1996, 1, 99.
9. Snook, K.; Zhao, J.; Alves, C.; Cannata, J.; Chen, W.; Meyer, J.; Ritter, T.; Shung, K. Design, Fabrication, and Evaluation of High Frequency, Single-Element Transducers Incorporating Different Materials. IEEE T. Ultrason. Ferr. 2002, 49, 169-176.
10. Lockwood, G.R.; Hunt, J.; Foster, F. The Design of Protection Circuitry for High-Frequency Ultrasound Imaging-Systems. IEEE T. Ultrason. Ferr. 1991, 38, 48-55.
11. Lockwood, G.R.; Hazard, C.R. Miniature Polymer Transducers for High Frequency Medical Imaging. SPIE Int. Symp. Med. Imag. 1998, 3341, 228-236.
12. Fiorillo, A.; Vanderspiegel, J.; Bloomfield, P.; Esmailzandi, D. A P(VDF-Trfe)-based Integrated Ultrasonic Transducer. Sens. Actuat. A-Phys. 1990, 22, 719-725.
13. Swartz, R.; Plummer, J. Integrated Silicon-PVF2 Acoustic Transducer Arrays. IEEE T. Electron. Dev. 1979, 26, 1921-1931.