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Volumn 519, Issue 1, 2010, Pages 197-202
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Homoleptic single molecular precursors for the deposition of platinum and palladium chalcogenide thin films
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Author keywords
Chalcogenides; Chemical vapour deposition; Palladium selenide; Palladium sulphide; Scanning electron microscopy; Thin films; X ray diffraction
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Indexed keywords
CHALCOGENIDE THIN FILMS;
CHEMICAL VAPOUR DEPOSITION;
HOMOLEPTIC;
LOW PRESSURE CHEMICAL VAPOUR DEPOSITIONS;
PALLADIUM SULPHIDE;
PT FILMS;
SCANNING ELECTRONS;
SELENIDES;
SINGLE-MOLECULAR PRECURSOR;
SINGLE-SOURCE PRECURSOR;
SULFUR ANALOGUES;
VARYING TEMPERATURE;
CHALCOGENIDES;
CHEMICAL VAPOR DEPOSITION;
DEPOSITION;
DIFFRACTION;
PALLADIUM;
PHASE CHANGE MEMORY;
PLATINUM;
PLATINUM COMPOUNDS;
SCANNING ELECTRON MICROSCOPY;
SULFUR;
THIN FILMS;
X RAY DIFFRACTION;
PALLADIUM COMPOUNDS;
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EID: 77957706942
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2010.07.101 Document Type: Article |
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Times cited : (19)
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References (19)
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