High performance polycrystalline thin-film transistors formed by copper metal induced unidirectional crystallization

Electronic Materials Letters

Volumn 5, Issue 2, 2009, Pages 91-94

  Kim, Young Su ^a   Lee, Min Kyu ^a   Shin, Bong Kwan ^a   Lee, Yong Woo ^a   Park, Jin Hyun ^a   Joo, Seung Ki ^a  

^a Seoul National University   (South Korea)

Author keywords

Copper; Metal induced lateral crystallization (MILC); Nickel; Thin film transistors

Indexed keywords

AMORPHOUS SILICON THIN FILMS; COPPER METAL; CRYSTALLIZATION RATES; DEVICE PERFORMANCE; GLASS SUBSTRATES; METAL-INDUCED LATERAL CRYSTALLIZATION; METAL-INDUCED LATERAL CRYSTALLIZATION (MILC); POLYCRYSTALLINE; POLYCRYSTALLINE SILICON THIN-FILM TRANSISTOR; PRACTICAL USE;

AMORPHOUS FILMS; AMORPHOUS SILICON; COPPER; CRYSTALLIZATION; METALS; NICKEL; POLYCRYSTALLINE MATERIALS; POLYSILICON; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES;

THIN FILM TRANSISTORS;

EID: 77957690718     PISSN: 17388090     EISSN: None     Source Type: Journal    
DOI: 10.3365/eml.2009.06.091     Document Type: Article

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